Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Endura II Aluminum Interconnect
PVD (Physical Vapor Deposition)
Date of Manufacture: 2018
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: ENDURA
Software Version: enB2.10_379
System Power Rating: 208V AC 3-Phase +480V AC Noraml
Loading Configuration: 3 load ports
Controller: GEN4
MFC/Pressure Unit: SCCM
Chm/Unit Position 1: VersaTTN; Gas: Ar/N2
Chm/Unit Position 2: HP AL; Gas: Ar
Chm/Unit Position 3: HP AL; Gas: Ar
Chm/Unit Position 4: VersaTTN; Gas: Ar/N2
Chm/Unit Position 5: HP AL; Gas: Ar
Chm/Unit Position C: VersaTTN; Gas: Ar/N2
Chm/Unit Position D: VersaTTN; Gas: Ar/N2
Chm/Unit Position E: DMD Degas; Gas: Ar
Chm/Unit Position F: DMD Degas; Gas: Ar
DEGAS Chamber
Chamber Position: E,F
Process Type: DMD
Pump, Turbo - Adixen: CRYO CTI
VERSA TTN Chamber
Chamber Position: 1/4/C/D
Process Type: VERSA TTN
Current Target Material: Ti
Shutter Option: Yes
Chamber Body: SST
Slit Valve Seal (bonded or o-ring): Bonded
Magnet Shim Thickness: 0.25mm
Magnet Type: HY-11
Magnet Part No.: 0010-25739
Magnet Serial No./ Manf. Date: na
Target to Magnet Spacing (mm): 0.9
AMAT Target Part No.: FNQ-T04-000263A
Target Vendor: NIKKO
Target Part No.: 190-00153
Target Thickness (in): 1.000+.005/-.005 in.
Target Bond Type: Monolithic
Max Target Life (KWH): 3000
Max Shield Life (KWH): 1000
Pedestal Type: A101
Pedestal Part No.: 0010-27432
Heater Spacing (mm): 60
Heater Spacing (steps): -52050
Cryo Pump: CTI
Cryo Restrictor: YES
CH 1 Cathode P/S: Pinnacle 20kW - AMAT 0190-34646-000 (AE P/N 3152411-243 A) F/R A
MFC 1 - gas / size (sccm): N2 / 200
MFC 2 - gas / size (sccm): Ar / 150
MFC 3 - gas / size (sccm): empty
MFC 1 - make / model: Brooks GF-125C
MFC 2 - make / model : Brooks GF-125C
MFC 3 - make / model: empty
ALUM Chamber
Chamber Position: 2/3/5
Process Type: HP AL
Current Target Material: Al 5%Cu
Shutter Option: Yes
Chamber Body: SST
Slit Valve Seal (bonded or o-ring): Bonded
Magnet Shim Thickness: 0.47
Magnet Type: WP AL
Magnet Part No.: 0010-03485
Magnet Serial No./ Manf. Date: na
Target to Magnet Spacing (mm): 0.9
AMAT Target Part No.: 0190-23518
Target Vendor: Honeywell
Target Part No.: 190-00154
Target Thickness (in): 0.88
Target Bond Type: Diffusion Bonded
Pedestal Type: DTESC
"Pedestal Part No.: 0010-33488
(Upper Puck Assembly)
0010-42030
(Lower Bellows Assembly)"
Heater Spacing (mm): 49mm
Heater Spacing (steps): -63500
Cryo : CTI
Cryo Restrictor: Yes
CH 2 Cathode Master P/S: Pinnacle 20kW - AMAT 0190-34646-000 (AE P/N 3152411-243 A) F/R A
CH 2 Cathode Slave P/S: Pinnacle 20kW - AMAT 0190-34646-000 (AE P/N 3152411-243 A) F/R A
Total Cathode Power: 40 kw
MFC 1 - gas / size (sccm): Ar / 200
MFC 2 - gas / size (sccm): ArH / 20
MFC 3 - gas / size (sccm): empty
MFC 1 - make / model: Brooks GF-125C
MFC 2 - make / model : Brooks GF-125C
MFC 3 - make / model: empty
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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