Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

LAM Research 2300 Versys Poly - Chamber Only

Asset ID: 209750

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LAM Research

2300 Versys Poly - Chamber Only

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2001

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

RF Power and DC Power supply and some parts are missing.​

Install Type is Stand Alone

Software Type is Lam Classic  

Software Version is 1.7.1

The system not On-Line

SECS Interface

Gas Panel Type is Standard 

Etcher Mainframe Type is Metal Versys Poly

Chamber Type

PM 1 / Main Chamber is Versys

PM 2 is Versys

PM 3 is Versys

Directory of Etch Chamber/System Types

9600, 9600SE, 9600SE II, 9600PTX, 9600DFM / Metal Etch

Microwave Strip, DSQ, PLL / Strip

9100 / Oxide Etch

9500 Triode Etch / Oxide Etch

Exelan / Oxide Etch

9400, 9400SE, 9400SE II, 9400PTX, 9400DFM / Poly Etch

 Signal Lamp Tower 

Clean Room Manuals

Remote Operator Interface

Equipe Autoloader

Orbitally Welded Gas Box

Backside Helium Cooling(elium Cooling MFC Type is S00097487)

On-Board RF Generators

Remote RF Cart 

Remote Gas Box

Main On-Board AC Distribution Type is Circuit Breaker

Remote AC Box

WVDS

Endpoint Detection System

Endpoint Lam Part Number is S00145413LE

Chamber Liner Present  

Chamber Anodization Condition

Wafer Clamp is ESC  

ESC Type is 312

TCP Coil Size 12”

PM2 – Endpoint Lam Part Number is S00145413LE

PM2 – Wafer Clamping Method isESC

PM2 – Chamber Liner Present

PM2 – Chamber Anodization Condition

PM2 – TCP Coil Size is12”

Main Etch Chamber Pump is EDW 

Model:IXH610 QTY:1 and included With System

Gas Box Configuration

Gas Line #1:Cl2 300(sccm) / HORIBA(Z312)

Gas Line #2:HBr 500(sccm) / HORIBA(Z312)

Gas Line #3:CHF3 500(sccm) / HORIBA(Z312)

Gas Line #4:CO2 200(sccm) / HORIBA(Z312)

Gas Line #5:O2 200(sccm) / HORIBA(Z312)

Gas Line #6:Ar 300(sccm) / HORIBA(Z312)

Gas Line #7:SF6 200(sccm) / HORIBA(Z312)

Gas Line #8:He 500(sccm) / HORIBA(Z312)

Gas Line #9:CH2F2 200(sccm) / HORIBA(Z312)

Gas Line #10:CH3F 200(sccm) / HORIBA(Z312)

Gas Line #11:70%He/O2 50(sccm) / HORIBA(Z312)

Gas Line #12:C2F6 200(sccm) / HORIBA(Z312)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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