Applied Materials (AMAT) Centris AdvantEdge G5 Mesa T2 Poly

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Tool Model: CNTMESA2

System Power Rating: 208 AC 3-Phase

Chamber A1: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He

Chamber A2: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He

Chamber B1: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He

Chamber B2: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He

Chamber C1: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He

Chamber C2: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He

Chamber D1: AxiSWLL; Chamber Chemicals Gases Used: N2, O2, H2/N2

Chamber D2: AxiSWLL; Chamber Chemicals Gases Used: N2, O2, H2/N2

Optional Gas

#1: O2, 15sccm

#2: SF6, 30sccm

#3: C4F6, 50sccm

#4: CF4, 50sccm

#5: Cl2, 100sccm

#6: HBr, 100sccm

#7: SO2, 100sccm

#8: CH2F2, 100sccm

#9: SF6, 200sccm

#10: BCl3, 200sccm

#11: HBr, 600sccm

#12: Cl2, 600sccm

#13: O2, 150sccm

#14: N2, 200sccm

#15: CF4, 300sccm

#16: CHF3, 400sccm

#17: Ar, 500sccm

#18: He, 1000sccm

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales