Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer GT Eterna FCVD

Asset ID: 209654

Print spec sheet

Applied Materials (AMAT)

Producer GT Eterna FCVD

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Segregation Requirement: Non Metal

Capable Levels: 4200-20 STI OXIDE DEP

Software Version (include revision #): pmB5.4_135

System Power Rating: 110 AC 3-Phase for System

Loading Configuration: 3 LP/9 cooling station/ 25 wafer FOUP


Chm/Unit Position A: ETERNA TWIN CHM A; Chemicals / Gases Used: NH3_SIDE2/NF3/AR_CLN/O2_LOW/O2_CLN/TSA/HE/NH3_SIDE1/H2O/AR_H2O

Chm/Unit Position B: ETERNA2 UV cure TWIN CHM B; Chemicals / Gases Used: AR_TOP/AR_SH/AR_BTM/NF3/AR_CLN/O3

Chm/Unit Position C: ETERNA TWIN CHM C; Chemicals / Gases Used: NH3_SIDE2/NF3/AR_CLN/O2_LOW/O2_CLN/TSA/HE/NH3_SIDE1/H2O/AR_H2O


Process Unit: FCVD

MFC/Pressure Unit: PSIA

FOUP Opener:Entegris, E99 Carrier RF Tag Reader 

Gas Panel Schematic for FCVD & UV


Fab Support Items (Reference)

1. Heat Exchanger SMC H2000(INR-498-012C) Qty2 

2. Chiller-20 SMC Qty 1

3. TSA/Purge N2/CO2 Cabinet: TSA Qty 2

4.UV AC Rack: AMAT        

5. Regulators box: Taiyo Nippon

6. O3 Generator: AMAT

7. AC BOX: AMAT

8. UV Curing System: AMAT

9. Process Vacuum Pump: Edwards 

10 Scrubber: DAS 

11 Buffer pump: Edwards 


Damage/Missing parts list

missing- Process Vacuum Pump: Edwards IH3000L(Qty:2)

missing-Scrubber: DAS escape Scrubber(Qty:2)

missing-Buffer pump:Edwards IH600L(Qty:1)

missing- TSA Cabin (Trisilylamine) Qty 2

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.