Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Producer GT Eterna FCVD

Asset ID: 20535

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Applied Materials (AMAT)

Producer GT Eterna FCVD

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.


CONFIGURATION & PHOTOS AVAILABLE. For further details of the configuration, please ask your sales person.

Missing or damaged parts: Not reported. Please inspect to confirm.


   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  ETERNA FCVD TwinN2,NF3,Ar,O2,TSA,He,NH3,H2O
Chm/Unit Position   2  NanoCure UV TwinN2,NF3,Ar,O3Ar
Chm/Unit Position   3  ETERNA FCVD TwinN2,NF3,Ar,O2,TSA,He,NH3,H2O
Chm/Unit Position ___  _________________________________________________________
Chm/Unit Position ___  _________________________________________________________
Chm/Unit Position ___  _________________________________________________________
Chm/Unit Position ___  _________________________________________________________
      
Refer to ADCS to extract the Doc 2 to update the Tool/System Configuration accordingly.   
(Tool owners require to ensure the physical tool configuration tally to what is listed)  
      
System Configuration     
Description     
Tool:     
Process Unit:  Model:Remark 
Controller:  N/A  
MFC/Pressure Unit:  STECZ700series  
Drive Mechanisms:  N/A  
FOUP Opener:  Sinfonia  
Gas System:  N/A  
Exhuast System:  N/A  




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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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