Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Strasbaugh 6DS-SP

Asset ID: 215018

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Strasbaugh

6DS-SP

Multi-Process CMP

CMP Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hsinchu, Taiwan

Available date: Currently Available

Serial Number2241197
Wafer Size (inches)8
Date of Last PM5/25/2022
Is System On-Line?NO
Off-Line Date (if applicable)6/12/2022
Can Produce Wafers AS IS?YES    
Any Known Field Modifications?NO
All Cables Present?YES    
Signal Lamp TowerYES
SMIF Interface NO
TungstenYES
Table 1 Gear Ratio 10:1 / other15:01
(Intel Carrier Kit)YES
Table 1 Conditioning ArmYES    
Polish Head Type8 inch
Wafer Loss SensorNA
Pad TypeTWI Pad
Pad Conditioner DiscChinese grinding wheel
Temperature ControlChiller
Chemicals UsedDSW-2500+H2O2+H2O
Dispense ArmExtended
Slurry Rinse Arm
Slurry Flow MonitorsYes
Second Table OptionYes
Standard NSK Direct DriveYes
High Throughput OptionYes
Side-to-Side Throughput OptionNo
Endpoint DetectionNO
Luxtron 9325NO
Hydro Lift Load Station 2NO
Spindle Return KitYES
(Kicker Cylinder)
Vacuum Plant UnitYES
Chiller UnitYES
Add-on FPDNO
1st / 2nd Table Separate ExhaustYES
Dual Slurry SourceNO
DI-Water Booster PumpNO
DI-Water Flow InterlockYES
Clean Room ManualsYES
Standard ManualsYES


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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