Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
Process: Inspection200mm/300 mm wafer inspection and review station
configured for brightfield (VIS and 337nm UV), darkfield, DIC (Nomarski) observation, CSM
Programed settings for light, aperture, zoom, field stop and DIC analyzer
Newport Kensington XY stage with 300mm x 300mm travel and 300mm vacuum wafer chuck
Zeiss Objectives:
Epiplan Neofluar 10x/0.30 HD DIC
Epiplan Apochromat 50x/0.90 HD DIC
Epiplan Apochromat 100x/0.95 HD DIC
Epiplan Apochromat 150x/0.95
Epiplan UV Insp 120x/0.95
TI MP-2000PF-U5 camera
Optronix S97670 camera and DEI-750D controller
MEG system with Hg-Xe lamp source
Zeiss LG-Xe 180w remote xenon illumination source
Zeiss 45 74 92 dual beam laser
autofocus (AF) assembly
Thermo VSL-337ND-S 337nm nitrogen laser
Photonic Instruments Micro-Point 2202/2279 assembly
Halcyonics (Accurian) MOD-2M active vibration isolation controller
MS Windows 2000 Professional operating system
CE Marked
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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