Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Nanometrics Inc. Tevet Trajectory T3

Asset ID: 19919

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Nanometrics Inc.

Tevet Trajectory T3

Film Thickness Measurement System

Metrology Equipment

Equipment details:

Date of Manufacture: TBD

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Lehi, United States

Available date: Currently Available

Tool Status:  New un-used.

Configuration.  Audit to verify.

 Nanometrics Tevet T3 9 Point systems
Qty 21. - Lot can be split. 

Row  Parent Compnt   Part Description                                                            Detailed Description       Comments
15    Trajectory T3                                                                                                  Fixed System Config.      SpectrometerWavelgth = 200-850nm 
                                                                                                                                                                        Spot size = 20mm
16    Trajectory T3       Recipe/sequence level:
                                     Authorized logins can add/removerecipe
                                     or sequence steps                                                             Security                            Login Based Security
17    Trajectory T3        Step level: Authorized logins can modify an
                                     individual parameter field within a step                             Security                            Login Based Security
18    Trajectory T3        Parameter level:  Authorized logins can modify
                                     individual parameter field within a step                              Security                            Login Based Security
19      Trajectory T3      Provide capability for ASCII-based recipe files                  Recipe Management        Recipe Management
20      Trajectory T3      Provide stand-alone recipe file viewing/editing software    Recipe Management       Recipe Management
21      Trajectory T3      Provide the binary file format so that we can
                                     decode/edit/display recipe information                               Recipe Management        Recipe Management
22      Trajectory T3                                                                                                 Manual                              NOA Operations manual
23      Trajectory T3                                                                                                 Manual                              NOA Installaiton and
                                                                                                                                                                          Maintenance Manual

Additional Notes:
  • These were purchased for use with LAM VECTOR EXTREME / EXTREME XT TEOS or AHM systems, but can also be used with VECTOR EXPRESS.
  • These are T3 TEVET systems with 9 site optical type D measurement heads.


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