Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Semitool Inc. Raider ECD310

Asset ID: 208664

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Semitool Inc.

Raider ECD310

ECD (Electro Chemical Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 1/28/2022

WET 11-3AMAT_RAIDER_CUPLT_10 AMAT RAIDER CUPLT


Tool config is based on original PO, please verify tool details at tool inspection


Process: 91/92 copper plating

Software Version: 2.13.4.24

System Power Rating: 480AC 3-phase

Loading Configuration: 3 load ports


Chm/Unit Position 1: Tank 1 H2O2-30% / H2SO4-96%

Chm/Unit Position 2: Tank 2 H2O2-30% / H2SO4-96%

Chm/Unit Position 3: Tank 3 CuSO4 catholyte

Chm/Unit Position 4: Tank 4 CuSO4 anolyte


Capsule Chamber: Rinse dry with bevel etch capability

CFD3m Chamber: Electroplating chamber with membrane

Loadport: FOUP Load/Unload Station

Buffer station: 16 slots (8 in put / 8 out put)

Transfer Robot: XT Robot with Delta TAU CTRL

Process Robot: XT Robot with Delta TAU CTRL

Tank 1: 20L Delivery Tank

Tank 2: 10L Mixing Tank

Tank 3: 180L Catholyte Tank

Tank 4: 65L Anolyte Tank

Exhuast: Bottom exhaust (8" *2 / 6" *1)

Chemical Connections: Catholyte A 180L

Chemical Connections: Anolyte A 65L

Chemical Connections: H2SO4

Chemical Connections: H2O2

Gas Connections: CDA

Chemical Connections: DI

Gas Connections: N2

Chemical Connections: House Vacuum


Fire Suppression: Scorpio CO2 cylinder, 3 Cylinder

Chiller: PAA-030L

Heater: PNE-H20K

RTA Real Time Analyzer: Capsule Chamber: Rinse dry with bevel etch capability

ULVAC: Insitu Metrology Unit, Eddy current measurement unit to monitor Cu film thickness


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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