Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Telius SP-305 SCCM

Asset ID: 79235

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Tokyo Electron Ltd. (TEL)

Telius SP-305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2008

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Process: Oxide

Sending Site Workstation Name: 11-3TEL_SCCM_CU_04HT

Software Version (include revision #): Ver5.75-Rev000-VSTD5.70a

System Power Rating: 208 AC 3-Phase

Loading Configuration: 5 Load ports


Chm/Unit Position  1: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6

Chm/Unit Position  2: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6

Chm/Unit Position  3: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6

Chm/Unit Position  4: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6


Standard Specifications

Software Revision: Linux Ver5.75-Rev000-VSTD5.70a

Lot Stability Dummy SW: Software for running lot stability wafer.

OEE WPH Software: Site license required

GEM SEC Revision: TBD

Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies

Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)

Interface A: Hardware related to EDA

Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)

Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)

Utility Box: Pressure Gauge : Bourdon Gauge

Loader Mod Corrosion Prevent: SUS Parts, Ball screw & Liner guide : PTFE Coating

Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)

Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)

Load Lock Pressure Monitor: CM : 626A01TDE (MKS)

Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)

Water Leak Detector: 5 (LM;1, each PS;1)

Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)

Data Back up: USB & Ingenio (Ingenio Management Server)

EMO: Front x3, Rear x6

Cable Length: One 15m and one 16m (Interconnection, RF cables)

Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)

Fittings: No brass fittings


Supporting Remote Units

Chiller: UBRPD5A-2T

Coolant: Lower:FC3283, Upper:FC40

Chiller Hose: BRINE HOSE 15/14M

Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A

RF Generator TOP: AGA-50B2

RF Matcher TOP: AMN-50B2

RF Generator Bottom: WGA-50E

Matching Controller: WMN-50H6(2MHZ/5KW)(PS3)

Pen Record Box: 2L80-00212-12

Loader Module: SELME2112ZS22-AD5

LOAD PORT: SELOP12F25-30U-14

DRIVE UNIT: SBX92102928

READER OPTICAL: ISS-1700-1TELCC

Carrier ID Reader: ATR-9100 + Gateway

APC: 10 INCH (250mm)VETX

Hardware Configuration


Proc Chbr 1,2,3,4: SCCM Oxide; Y203 Coating

Chamber hardware: FCC

Endpoint type: SE2000ii

ESC type: Ceramics ESCwith STD Vpp

Focus ring: 3.4mm

Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins.

Polished focus ring: O

FC lower insulator: FC lower insulator w/quartz upper ring shield

Magnet Shield: O

Oring for Chbr Body-Depos: Armorcrystal

CEL Body ASSY: Brine Control Mode

TMP: FT-3301W (MITSUBISHI)-10Inch

TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)

Dry Pump: ESR80WN, KEG approved

Final Valve, Heater: Valve; OGD10V-4RJ-K (CKD)

Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)

APC: Pendulum Motion Dia., 250mm(VETX), R.T.~90deg

Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa

Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa

Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa

Pressure Monitor: ATM Switch : 51A13TGA2AA720 (MKS)

Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas


Gas Box Configuration

Gas Line 1: Gas line 1- N2 1000 sccm-AERA FCD985CT-BF

Gas Line 2: Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF

Gas Line 3: Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF

Gas Line 4: Gas line 4- O2 50 sccm-AERA FC-D985CT-BF

Gas Line 5: Gas line 5- CH2F2 100 sccm-AERA FC-D985CT-BF

Gas Line 6: Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF

Gas Line 7: Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF

Gas Line 8: Gas line 8- C4F8 50 sccms-AERA FC-D985CT-BF

Gas Line 9: Gas line 9- CO 500 sccms-AERA FC-D985CT-BF

Gas Line 10: Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF

Gas Line 11: Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF

Gas Line 12: Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF

Purge: N2 (Process Grade N2)

Filter: CNF1004USG4 (Nihon Pall)

Regulator: SQMICRO (VERIFLO)

Filter (N2): SQMICRO (VERIFLO)

Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)

Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)

Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box)

Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)

Final Pressure Switch: 51A (MKS)

Pressure Gauge: Bourdon Gauge (with inside finishing)

Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa

SP3 Gas Line Connection: SP3 Gas Line Connection

GBROR


Process Kit Configuration

WINDOW, SHIELD DEPO(DRM2) QRTZ: WINDOW, SHIELD DEPO (DRM2) QUARTZ

WINDOW DEPO SAF0.5(DRM2) SAPPh: WINDOW DEPO SAF0.5(DRM2) SAPPHIRE

SHIELD, UP 300MM RING-Qrtz: SHIELD, UPPER 300MM RING - Quartz

Insulator, ESC Enclosure (COC): Insulator, ESC Enclosure (COC) - Quartz

Cover Ring, 360- L (M) - Qrtz: Cover Ring, 360- L (M) - Quartz

RING, BTM SHIELD Y-AL, SE: RING, BTM SHIELD Y-AL, SE

PLATE,EXHAUST Y-AL, SE: PLATE,EXHAUST Y-AL, SE

SHUTTER,BTM TYPE Y-AL, SE: SHUTTER, BTM TYPE Y-AL, SE

SHIELD,DEPO: SHIELD,DEPO

Focus Rg, 360-302-COC: Focus Rg, 360-302-COC

Insultr, lwr T32-R6-BL-NC: Insulator, lower T32-BI-NC

WINDOW,DEPO CLP: WINDOW,DEPO CLP

SCREW PIN LOCK, Cerazol: SCREW PIN LOCK, Cerazol

Si Upper Electrode: Si Upper Electrode

CEL ASSY: CEL ASSY

ESC ASSY: ESC ASSY (with ceramic pusher pins)


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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