Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: OX
From original tool PO, please inspect to verify
Software Revision: B2.8_79
FI Software: FB4.70_12
GEM Software: 7.20_17
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
Inter Face: 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant MENV and FMS assemblies
Interface A: Hardware related to EDA
Corrosion Resistant FI & SWLL: N/A
Loader Mod Corrosion Prevent: N/A
Standard SWLL: Standard SWLL
Side Storage Pod: Side Storage Pod (Left/Right)
OCR: KIT, YAT BACKSIDE OCR, 300MM 5.3FI
Facility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switch
Facility Plate: Manual Valve : Supplied by customer in floor
Facility Plate: Pressure Gauge : Supplied by customer on regulator in floor
Transfer Pressure Monitor: 10 Torr Manometer and 1SLM N2 APC, kit
Transfer Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
Load Lock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
Transfer Chamber Blade Kit: Transfer Chamber Accelerator Blade Kit
LL ISO-Slit Valve Grp Elast.: AP Chemraz 513 Elastomer
Atmospheric Robot: KAWASAKI A3
Mainframe Robot: VXP with Dual blade
Wafer Pass Through: Not available
Loadport type: Enhanced 25 wafer FOUP
Loadports: Loadport System
Open Cassettes Supported: N/A
Water Leak Detector: Configured
EMO Type: Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.
System Monitors: Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the wall flat panel (optional)
Cable Length: RF Cable : 2 cables 75 ft; 1Short Cable
Cable Length: Mnitor Cable : 25 Ft 16ft effective
Cable Length: Pump Cable Length : 75 ft interface cable
Signal Tower: Red/Yellow/Green/Blue ( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUG
Inter Lock: On board interlocks to dissable RFand gas flow at 1/2 atmos., and lid or gas panel door open.
Inter Locks: On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.
Certificate of Cleanliness: N/A
Remote UPS Interface: N/A
Scrubber Interlock: N/A
Etch Common AC Rack: Lean AC Rack
"Chiller (wall/source): NX20A(ZT150 coolant)
0190-17815"
Chiller (Dual Zone Cathode): NX20A (ZT130 coolant)
"Coolant: Galden ZT-130 for Cathode
Galden ZT-150 for Wall/Source
Galden FC-3283 for Cathode/Wall/Source
"
Chiller Hose Length: 75'
RF Gen TOP (162Mhz Source): 3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER COOLED (0190-29389)
"RF Gen #1 Bottom (13Mhz Bias): RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT)
0190-15319"
"RF Gen #2 Bottom (2 Mhz Bias): RF GEN PLASMA 9KW 2MHZ ENI)
0190-29586"
"RF Match: Y
(0190-25187)"
IPUP Type: Alcatel A100L (0190-01042)
Process Chb.1,2,3,&4: (IAEF) Enabler (Front End-E5)
Endpoint type (Eye-D): Endpoint type (Eye-D)(0246-00196)
Plasma State Monitor: Plasma State Monitor (1 per system) (0190-17948)
Spectrograph: EyeD HP Spectrongraph (0190-28658)
ESC type (Dual Zone): ESC type (Dual Zone) (0010-33416)
Cathode Base: Non-Anodized (0041-05779)
Cathode N2 Purge: Cathode N2 Purge - Yes
L-collar Si Insert Ring: L-collar Single Crystal Si Insert Ring 1.5mm step
TMP: Shimadzu D3403M, 3000 litre
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS) Foreline Transducer
Dry Pump: N(ESR80WN (EBARA) ; customer Supply)
Final Valve, Heater: N/A
Wfib: Y(Wfib - Mod (Restriction at RTN))
APC: VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSOR
Slit Valves: Anodized (AL) 513 Chemrz
Pressure Monitor: 1,000 mt Head
Pressure Monitor: 100 mt Head
Pressure Monitor: Transducer 100 Torr Cal Tank
Pressure Monitor: Chamber ATM Switch : 51A13TGA2AA720 (MKS)
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Switch flow through 600Torr
Chamber Controller Module: SBC C400MHZ, 3U CPCI, 256MB RAM
FES Server: FES Server
NSR# 621632-0: Enabler Chamber FRCII, ratio 1000/1000
NSR# 621638-0: Chamber First in Fab for IADB Enabler Chamber
NSR# 621633-0: Transforma run to run option
Thottle Gate Valve (TGV): Throttle Gate Valve (TGV) - Ceramic
Gas Line 1: Gas line 1- C4F6 100 sccm UNIT IFC-125
Gas Line 2: Gas line 2- CH2F2 100 sccm UNIT IFC-125
Gas Line 3: Gas line 3- C3F8 50 sccm UNIT IFC-125
Gas Line 4: Gas line 4- O2_M 300 sccm UNIT-125
Gas Line 5: Gas line 5- SO2 200 sccm UNIT IFC-125
Gas Line 6: Gas line 6- CF4 200 sccm UNIT IFC-125
Gas Line 7: Gas line 7 - C4F6_IGI 5 sccm UNIT-125
Gas Line 8: Gas line 8 - O2_IGI 5 sccm UNIT-125
Gas Line 9: Gas line 9- O2_L 50 sccm UNIT-125
Gas Line 10: Gas line 10- O2_H 5000 sccm UNIT-125
Gas Line 11: Gas line 11- Ar 2000 sccm UNIT-125
Gas Line 12: Gas line 12- N2 200 sccm UNIT-125
Gas Line 13: Gas line 13- CHF3 200 sccm UNIT-125
Gas Line 14: Gas line 14- C4F8 100 sccm UNIT-125
Gas Pallet Type: NextGen
Gas Pallet: ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GEN
Regulators: Regulator on SLD (Inlet to Gas Pannel, 1 per unique gas, 12 max, VCR connection)
Valves: CKD
Transducers: Transducers inside MFC's
Flow Ratio Controller (NSTU): Flow Ratio Controller (NTSU)
IGI Interlock: N/A
Filters: MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)
Gas Leak Detection Port: External Connection Point
Gas Panel Exhaust: Top Exhaust
Gas Panel Facilities Hook Up: Single Line Drop
Piping: Standard high purity stainless & Exhaust through Gas box
Final Pressure Switch: At 600 Torr coming from gas pallet, At chambers swithch pressure signal 10 torr half atmosphere
Purge: N2 (Process Grade N2)
L-collar Single Crystal Si: L-collar Singe Crystal Si Insert Ring 1.5mm step
Source Bottom Ring: QUARTZ RING SOURCE, E5(0200-07362)
Quartz Barrier Ring: Quartz Barrier Ring (0200-03170)
TGV o-ring: TGV o-ring (3700-03701)
TGV Hard Stop - Ceramic: TGV Hard Stop - Ceramic
TGV Pads: TGV Pades (0041-03304)
Source Chiller Bypass: Source Chiller Bypass
Annular Baffle Heated: Annular Baffle Heated
Cover, Lower Liner: Cover, Lower Liner
Upper Liner: SUPPORT LINER (0040-37601)
Process Kit: Process Kit
"Showerhead Assy: Showerhead Assy, 4mm SiC Top Electrode
Tokai (0041-32335)"
Aluminum shims: Polymer Shims(0242-55460)
Plasma Containment Door: Plasma Containment Door
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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