Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) Telius SP 305 DRM

Asset ID: 209823

Print spec sheet

Tokyo Electron Ltd. (TEL)

Telius SP 305 DRM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

DRY ETCH 15-3TEL_TLUDRM_OX_02AOXEB TEL DRM


Missing or damaged parts: Checking with Fab15 on them.

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