Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Telius SP-305 SCCM

Asset ID: 12379

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Tokyo Electron Ltd. (TEL)

Telius SP-305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 5/20/2022

Process: OX

Standard Specifications
Software Revision: Linux 5.75 Rev 001
Lot Stability Dummy SW: Software for running lot stability wafer.
OEE WPH Software: Yes
GEM SEC Revision: TBD
Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies
Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)
Interface A: Yes
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Loader Mod Corrosion Prevent: NO, without Corrosion Prevent
Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)
Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)
Load Lock Pressure Monitor: CM : 626A01TDE (MKS)
Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)
Water Leak Detector: 5 (LM;1, each PS;1)
Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
Data Back up: USB& MO
EMO: Front x3, Rear x6
Cable Length: One 15m and one 16m (Interconnection, RF cables)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Fittings: No brass fittings

Supporting Remote Units
Chiller: UBRPD5A-2T?
Coolant: Lower:FC3283, Upper:FC40
Chiller Hose: BRINE HOSE 15/14M
Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A
RF Generator TOP: AGA-50B2
RF Matcher TOP: AMN-50B2
RF Generator Bottom: WGA-50E
Matching Controller: WMN-50H6(2MHZ/5KW)(PS3)
Pen Record Box: 2L80-00212-12
Loader Module: SELME2112ZS22-AD5
LOAD PORT: NO,Bolts-L type
DRIVE UNIT:SBX92102928
READER OPTICAL: ISS-1700-1TELCC
Carrier ID Reader: NO,V640series+V700-L22 (Omron)
APC: 12 INCH (320MM)

Hardware Configuration
Proc Chbr 1,2,3,4: SCCM Oxide; Y203 Coating
Chamber hardware: FCC
Endpoint type: SE2000ii
ESC type: Ceramics ESCwith STD Vpp
Focus ring: 3.4mm
Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins
Polished focus ring: O
FC lower insulator: FC lower insulator w/quartz upper ring shield
Magnet Shield: O
Oring for Chbr Body-Depos: Armorcrystal, Chemraz SC657
CEL Body ASSY: Brine Control Mode
TMP: TMP-3403LMC-T4(VG300) (SHIMADZU)
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)
Dry Pump: ESR80WN, KEG approved
Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)
Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)
APC: Pendulum Motion Dia., 320mm(VAT), R.T.~90deg
Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor: N,41A13DGA2AA040 (MKS), no process impact
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas

Gas Box Configuration
Gas line 1- N2 1000 sccm-AERA FCD985CT-BF
Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF
Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF
Gas line 4- O2 50 sccm-AERA FC-D985CT-BF
Gas line 5- CH2F2 30 sccm-AERA FC-D985CT-BF
Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF
Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF
Gas line 8- C4F8 50 sccms-AERA FC-D985CT-BF
Gas line 9- C3F8 50 sccms-AERA FC-D985CT-BF
Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF
Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF
Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF
Purge: N2 (Process Grade N2)
Filter: CNF1004USG4 (Nihon Pall)
Regulator: SQMICRO (VERIFLO)
Filter (N2): CNF1004USG4 (Nihon Pall)
Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)
Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)
Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box)
Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)
Final Pressure Switch: 51A (MKS)
Pressure Gauge: Bourdon

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