Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

KLA-Tencor Corp. AIT UV

Asset ID: 207234

Print spec sheet

KLA-Tencor Corp.

AIT UV

Darkfield Inspection

Metrology Equipment

Equipment details:

Date of Manufacture: 2008

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

HARD DRIVE WILL BE REFORMATTED. OPERATING SOFTWARE IS NOT INCLUDED.


Inspect to confirm configuration and condition.

Unable to take photo of the tool due to stored at one corner pack with other tools.


General System Info

Equipment ID: CUDDFINP-05

Date of Audit: Feb-2022

Serial Number: UV1167

Original Ship Date from KLA: 2006

Wafer Size (inches): 12

Loading Configuration: FOUP

Number of Cassette/FOUP Positions: 2

Software Version: 6.3.89.5

Login User ID: NA

Login Password: NA

Electrical Requirements: NA

Is System On-Line?: No

Off-Line Date (if applicable): 2019

CE Mark Certified? : No

Date of Last PM: No

Date of Last Laser Change: NA

OEM Audit Available?: No

Can Produce Wafers AS IS?: No

Any Known Field Modifications?: No

All Cables Present?: NA


System Configuration

Main Platform: Fusion UV  


Key Common Options 

Clean Room Manuals: No

Standard Manuals: No

External Panels (Skins): Cleanroom White  

Chuck Type: Universal Ceramic / Other

GEM/SECS Interface: Yes


AIT LUV Series Options 

Hierarchical Load Adaptive Thresholding (HLAT): No

Auto-Positioning System: No

iADC Processor: No


Internal Review – Optical Microscope 

Spot Optics (um): 3.5 um, 6 um


External Support Equipment

Laser Power Supply: Yes

Image Computer: Yes

Blower Box: Yes

Number of Blower Boxes: 1

Chiller Make/Model: KLA PILLAR


The equipment include ISO loadport*2 & Wafer handler*1 & Inspection unit*1 & Line conditioner*1

Damaged parts:

1.Robot-ABM407

2.Track motor

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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