Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
The equipment use of destructive methods to deinstallation the equipment.
Damage/Missing parts list, please inspect tool to reconfirm.
Dry pumps and customer provided items not included on sales.
Inspect to confirm configuration and condition.
The robot is missing and the PC is damaged.
Model：ZETA300 G3
Original Ship Date from FSI 2006/10/12
Date of Last PM 2016/05/12
Off-Line Date is 2017
Electronics Console Type is Short
Directory of System Types
OC：50 wafer at a time
MP:Multi Position
MHS:Material Handling System
Key Common Options
Clean Room Manuals
Standard Manuals
Chemical Canister Consoles is 2
Turntable Style is Titanium
Robot Type
BROOKS 2406 V2 MHM ROBOT
史陶比而 TX90XLSCRFSI2 CASSETTE ROBOT
Process Modules
1.Fluid Delivery Module (FDM)
2.Process Module (PM)
3.Material Handling Module (MHM)
4.Canister Console(s)
5.Power Distribution Cabinet
Canister #
1.H2O2(1)
1.H2O2(2)
1.NH4OH
2.HCL
2.DHF
2.H2SO4
Overall Condition：Some parts are missing and cannot be turned on
Visible Corrosion：No
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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