Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
| Excess items | Vendor | Model | Qty |
| Abatement | EDWARDS | Atlas TCS MK3 | 1 |
| Abatement | EDWARDS | Atlas TPU MK3B | 5 |
| Abatement | EDWARDS | Atlas TPU2S MK2 | 1 |
| Abatement | EDWARDS | Helios4 +s/m | 3 |
| Abatement | EDWARDS | Legacy TPU2S + WRU | 5 |
| Abatement | EDWARDS | Legacy TPU2S + SM + WESP | 1 |
| Area | Vendor | Type | Model | overhaul | S/N | Bonded No. | Fixed Asset No. | location |
| FST | Edwards | abatement | Atlas TCS mk3 | done PM | 106350847 | DS100073 | C10203R00313-0 | A1 4F Cu |
| FST | Edwards | abatement | Atlas TPU mk3B | done PM | 146008879 | DS140031 | C10203R00365-0 | A1 4F Cu |
| FST | Edwards | abatement | Atlas TPU mk3B | done PM | 136310386 | DS140030 | C10203R00364-0 | A1 4F Cu |
| FST | Edwards | abatement | Atlas TPU mk3B | done PM | 136257346 | DS130337 | C10203R00362-0 | A1 4F Hi-K |
| FST | Edwards | abatement | Atlas TPU mk3B | done PM | 136257345 | N/A | N/A | A1 4F Hi-K |
| FST | Edwards | abatement | Atlas TPU mk3B | done PM | 146148981 | DS140751 | 1209579 | A2 1F |
| FST | Edwards | abatement | Atlas TPU2S mk2 | done PM | 00003294 | 971180 | C10203R00253-0 | A1 4F Hi-K |
| FST | Edwards | abatement | Helios4 +S/M | done PM | 76207311 | N/A | C10203R00353-0 | A2 1F |
| FST | Edwards | abatement | Helios4 +S/M | done PM | 76111542 | N/A | C10203R00082-0 | A2 1F |
| FST | Edwards | abatement | Helios4 +S/M | done PM | 76185865 | N/A | C10203R00093-0 | A2 1F |
| FST | Edwards | abatement | Legacy TPU2S + WRU | done PM | 76207283 | N/A | C10203R00075-0 | A1 Phase2 1F |
| FST | Edwards | abatement | Legacy TPU2S + WRU | done PM | 76224731 | N/A | C10203R00108-0 | A1 Phase2 1F |
| FST | Edwards | abatement | Legacy TPU2S + WRU | done PM | 76224739 | N/A | C10203R00110-0 | A1 Phase2 1F |
| FST | Edwards | abatement | Legacy TPU2S + WRU | done PM | 76227511 | N/A | C10203R00111-0 | A1 Phase2 1F |
| FST | Edwards | abatement | Legacy TPU2S + WRU | done PM | 66114465 | DS130336 | C10203R00361-0 | A1 4F Hi-K |
| FST | Edwards | abatement | Legacy TPU2S+SM+WESP | done PM | 76202874 | N/A | C10203R00112-0 | A1 Phase1 1F |
Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor, flat panel display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use. Atlas abatement technology specific to your process:ATLAS™ GAS ABATEMENT SYSTEMS
• Atlas TCS for common CVD gases (NF3/F2)
• Atlas TPU for PFC gases (ClF3, C2F6, C3F8) in CVD processes
• Atlas Kronis for the low-k CVD gases in next-generation processes
• Atlas Etch for semicon etch and flat panel display processes (CF4, SF6 and high flow PFC’s)
• Atlas Helios for safe treatment of hydrogen processes in epitaxy and MOCVD
Features and Benefits
• Low cost of ownership —— Low fuel consumption & Reduced running costs
• Excellent powder handling
• Excellent corrosion resistance
• Outstanding reliability, even on the harshest applications
• Ease of maintenance
• Third party certification —— SEMI® S2, CE marked, ETL listed
• Unrivalled abatement performance for deposition and clean gases
• Flame retardant plastic used in wet stage —— No corrosion from acidic by-products & Lower risk of thermal discharge
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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