Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

ATLAS™ GAS ABATEMENT SYSTEMS

Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor, flat panel display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use. Atlas abatement technology specific to your process:

• Atlas TCS for common CVD gases (NF3/F2)

• Atlas TPU for PFC gases (ClF3, C2F6, C3F8) in CVD processes

• Atlas Kronis for the low-k CVD gases in next-generation processes

• Atlas Etch for semicon etch and flat panel display processes (CF4, SF6 and high flow PFC’s)

• Atlas Helios for safe treatment of hydrogen processes in epitaxy and MOCVD

Features and Benefits

• Low cost of ownership —— Low fuel consumption & Reduced running costs

• Excellent powder handling

• Excellent corrosion resistance

• Outstanding reliability, even on the harshest applications

• Ease of maintenance

• Third party certification —— SEMI® S2, CE marked, ETL listed

• Unrivalled abatement performance for deposition and clean gases

• Flame retardant plastic used in wet stage —— No corrosion from acidic by-products & Lower risk of thermal discharge