Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

ASM International A412 Doped Poly

Asset ID: 28216

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ASM International

A412 Doped Poly

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 1/29/2021

Process: POLY


Tool config is based on original PO, please verify tool details at tool inspection


Tool & Auxillary Settings

Software version: 6.80C

Heater Type: MRL

Loader configuration, 4 or 5 loader: 4


Quartzware Configuration

Outer tube: Quartz

Inner tube: Quartz

Boat: SiC boat

Boat fix ring/Cap quartz: Quartz

Adiabatic plate quantity: 6

Back N2, Qty: N/A

BCl3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A

SiH4, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L

O2, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) E

PH3, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L

ClF3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A


Vacuum Line configuration

Design: original config

10 Torr Baratron model: MKS

10 Torr Baratron full scale setting: 10(F/S)

1000 Torr Baratron model: MKS

1000 Torr Baratron full scale setting: 1000(F/S)

ATM sensor model: MKS

Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger 

Check valve model: Fujikin

Check valve resistance pressure: 2.26 Kpa

Mainvalve type, Kitz or CKD: MKS

Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003)

Slow valve orifice size: 2.0mm (PV003)

Pressure range of vacuum gauge(Inficon Pirani gauge): 10T


Control Table

Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)): 

U: 0.7/0.7/30S

CU: 0.7/0.7/30S

C: 0.7/0.7/30S

CL: 0.7/0.7/30S

L: 0.7/0.7/30S

Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)): 0.02/0.02/30S

MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)): 

MFC1: N2: 2%/2%/10sec

MFC2: N2: 2%/2%/10sec

MFC3: N2: 2%/2%/10sec

MFC4: N2: 2%/2%/10sec

MFC5: SiH4: 2%/2%/10sec

MFC6: SiH4: 2%/2%/10sec

MFC7: SiH4: 2%/2%/10sec

MFC8: 1%O2/Ar: 1%/1%/10sec

MFC9: 5%PH3/N2: 2%/2%/10sec

MFC10: 5%PH3/N2: 2%/2%/10sec

MFC11: 5%PH3/N2: 2%/2%/10sec

MFC12: ClF3: 10%/10%/10sec

MFC13: N/A

MFC14: N/A

MFC15: N/A

MFC16: N/A

MFC17: N/A

MFC18: N/A

MFC19: N/A

MFC20: N/A

MFC21: N/A

APC Valve Action (High (%), Low (%), Time(s)): N/A


Transfer Table 

Side Dummy: Upper:5 / Lower:10

Product: 100

Monitor: 5

Product & Monitor: 105

2nd charge time(min): 0

wafer cool time(min): 20min


Leak Rate Table 

Base pressure low Limit(Torr): 1%

Base pressure High Limit(Torr): 1%

Leak Check check time(s): 60s

Leak Check delay time(s): N/A

Leak limit(Torr): 1%

Retry Limit(count): 2

Loadlock Settings

Loadlock configuration

O2 analyser model, NGK or Toray: PBI3.1 / PBI4.0


Process: 

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A


L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A


Idle: 

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A

L/A O2 check time (min): N/A

L/A O2 limit (ppm): 10ppm

POD opener O2 limit (ppm): N/A

POD O2 check time(min): N/A

POD check retry : N/A


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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