Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

Tokyo Electron Ltd. (TEL) TELFORMULA Anneal

Asset ID: 210196

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Tokyo Electron Ltd. (TEL)

TELFORMULA Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2004 March

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

EQUIPMENT IDCUALLOY-03
AUDIT DATEJAN. 13, 2022
SERIAL NUMBERP00000315019
ORIGINAL SHIP DATESEPT. 2005
SOFTWARE VERSIONTELFORMULA-2 VERSION 1.41 REV. R009 (F007FF-00000)  SOFTWARE NOT INCLUDED
SYSTEM CONTROLLERTEL WAVES
DATE OF LAST PMAUG. 2021
SYSTEM ONLINEYES
CAN PRODUCE WAFERS AS ISYES
KNOWN FIELD MODSNO
ALL CABLES PRESENTYES
TEL MODEL NUMBERFORMULA REV 0
TEL PROCESS NAMEANNEAL
CUSTOMER PROCESS NAMECUALLOY
TEMP RANGE0-450C
PROCESS CONDITIONLP
HEATER ELEMENT MODELLOW TEMP VCM-40-001L
FORCE AIR COOLINGYES
SIDE MAINTENANCEYES
O2 DENSITY CONTROLYES
N2 BOAT SHOWER WAFER COOLINGYES
FURNACE TEMP CONTROLLERYES
AUTO SHUTTERYES
WAFER TYPE300MM SI SEMI STD NOTCH
CARRIER TYPEASYST TYPE G4
CARRIER STAGE CAPACITY4
WTU TYPETEL
QTY OF PRODUCTION WAFERS50
BOAT OPERATIONSINGLE
MFC OEMHORIBA
PRESSURE TRANSDUCERNAGANO KEIKI ZT15-Z20-17110(-0.1-0.5MPA)
GASMFC MODELLINEMFC SIZE
N2  F750BMOA1-800A-UCNX50SLM
N2  F740BMOA1-800A-UCN15SLM
N2  F730MOA1-800A-UCNW1300SCCM
N2  F730MOA1-800A-UCNW2300SCCM
H2 F740MCA1-800A-UCH25SLM
LOW TEMP HEATERS00170001ALLOY
VACUUM PUMP INCLUDEDYES
OEMEDWARDS
MODELIH80
N2 BALLAST PRESSURE CONTROLNO
VACUUM GAGES
2T1
10T1
100TN
1000T1
LOW VAUUM VALVEYES
MAIN VALVEYES
ELCTRICAL REQUIREMENTS400V
OPERATING SOFTWAREWAVES







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