Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Electric Co., Ltd Quixace Ultimate ALD SiN

Asset ID: 207311

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Kokusai Electric Co., Ltd

Quixace Ultimate ALD SiN

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

DIFFUSION 11-3HIKE_QAU_ALDNIT_01 HIKE QUIXAULT ALDSIN


Tool config is based on original PO, please verify tool details at tool inspection


General Specification

Model: Quixace Ultimate

Wafer Size: 300mm

Layout Drawing: D5CS29487

Footprint Drawing: D2CP18963

Facility Drawing: D5CP10900-2/2

Tool cable drawing: D1EF62988

Process: ALD Nitride

Gas Pattern Drawing: D7CS29874


Supporting Remote Units (Reference ONLY)

Dry Pump: iXH3030T

Abatement System Type: TBD

Abatement System Provided By: Customer

Abatement System Maker/Model: TCS


HardWare Configuration, Options

Cartridge heater: Cartridge heater RHC-2= D4EX31754

TC, Heater Control: TC for heater control

TC, Over-temperature: TC for over-temperature protection

5-P T/C, Cascade: 5-P T/C for Cascade Control

1-P T/C, Profile: 1-P T/C for Profile Control (Please refer Maintenance Items section)

Thyristor: Thyristor Unit for Heater Control

Clean Module Unit1: Clean Module Unit

Clean Module Unit2: Clean Module Unit

Clean Module Unit3: Clean Module Unit

Clean Module Unit4: Clean Module Unit

Rapid Cooling Unit 

Controller 

I/O SHUTTER: I/O SHUTTER

STAGE: AGV/PGV/OHT STAGE

FOUP LOADER: FOUP LOADER

FOUP STORAGE: ROTATION FOUP STORAGE

FOUP OPENER: FOUP OPENER

WAFER DETECTION: WAFER DETECTION

WAFER TRANSFER: WAFER TRANSFER

WAFER PITCH CONVERTER: VARIABLE WAFER PITCH CONVERTER

BOAT ELEVATOR: BOAT ELEVATOR

BOAT CHANGER: BOAT CHANGER

FURNACE PORT SHUTTER: FURNACE PORT SHUTTER

BOAT ROTATION: BOAT ROTATION 

AWTC Port: D5CP18377

FLANGE-Upper

FLANGE-Lower


HardWare Configuration, Process Kit1

Kit 1 Selection: This kit is all quartz design WITHOUT injection

Boat:boat 

Reactor Tube : Quartz Outer Tube

Inner Tube: N/A

Adiabatic Plate: SiC Adiabatic Plate

Nozzle: Gas Nozzle

DIFFERENTIATING PIN: DIFFERENTIATING PIN

Seal Cap Plate: Quartz Seal Cap Plate

Boat Base: Quartz Boat Fixing Ring

Quartz Shutter Plate: Quartz Shutter Plate


HardWare Configuration, Process Kit2

Kit 2 Selection: This kit is all quartz design WITH injection


HardWare Configuration, Gas System

Gas Unit (IGS): D7VX49878

Tape Heater, Gas Pipe1: 

Mass Flow Controller: SEC-Z500 series

Pressure Gauge W/SWITCH: PG/PS 1~7

Regulator: MP1,5

Regulator: MP2~4,7

Filter: F1,5,6

Filter: F2~4,7~10,12~14

Gasket filter: GF1~7

Hand valve: HV1~5,7

Hand valve: HV6

Hand valve: HV10

Needle Valve: NV1~3

Check valve: CV1,5

Check valve: CV2,3

Check valve: CV4

Air Valve: AV1,2,4,5

Air Valve: AV3,6,10,24

"Air Valve(2-3B): AV7-8,9-11,12-13,14-15,16-17,18-19,25-26,27-28

"

Air Valve(2-3B): AV20-21,22-23


HardWare Configuration, Gas System MFC

MASS Flow Controller: MFC1, N2 ,3Slm

MASS Flow Controller: MFC2, N2 ,10Slm

MASS Flow Controller: MFC3,4 , N2 ,10Slm

MASS Flow Controller: MFC5, SiH2Cl2 ,3Slm

MASS Flow Controller: MFC6.7,NH3 ,10Slm

MASS Flow Controller: MFC8, 20%F2/N2 ,20Slm

MASS Flow Controller: MFC9 , N2 ,1Slm

MASS Flow Controller: MFC10 , N2 ,5Slm


HardWare Configuration, Exhaust System

Vacuum Sensor : 1000Torr

Vacuum Sensor : 10Torr

Vacuum Sensor : 10Torr

ATM pressure sensor: PA830 102G-VCR

Main Valve: Controller

Main Valve: Valve

Exhaust Piping: D5CS11556

Exhaust Dilution Line: D5CS11558

Reactor Tube Press Leak Line: D5CS11557

"Background line: D5CS01761

NH3,DCS,%F2/N2,Gas1"

Tape Heater, Exhaust Line: N/A

Jacket Heater, Exhaust Pipe: Jacket Heater, Exhaust Pipe 

Seal cap heater: Seal cap heater1

Seal cap heater: Seal cap heater2

Inlet Flange Tube Heater: D7EX40413

Inlet Flange Heater: D7EX47555

Inlet port heater: D7EX47556

Cold Trap


HardWare Configuration, Facility Interface

POWER: See Layout drawing D5CS00118-2/2, BOTTOM

GASES: See Layout drawing D5CS00118-2/2, BOTTOM

Exhaust (to duct/House): See Layout drawing D5CS00118-2/2, BOTTOM

Exhaust (to Pump): See Layout drawing D5CS00118-2/2, BOTTOM

Process Cooling Water: See Layout drawing D5CS00118-2/2, BOTTOM

UPS Requirement: Yes. Electrical connection point to main controller to tie facility supplied UPS


HardWare Configuration, LoadLock Requirements

O2 Monitor: O2 Monitor / Detector

FOUP Opener, System: FOUP Opener N2 Purge System

Load Area MFC: Loading Area MFC

Load Area N2 Purge: Loading Area N2 Purge Line

FOUP Opener, Line: FOUP Opener N2 Purge Line

Wafer Cooling N2: Wafer Cooling N2 Purge Line= N/A

Furnace Port N2: Furnace Port N2 Purge Line

Radiator: Radiator (Heat exchanger)

Filter, carbon/chemical1: Filters (carbon/chemical filter)

Filter, carbon/chemical2: Filters (carbon/chemical filter)

Filter, carbon/chemical3: Filters (ULPA filter)


Controller Interface, System

Main Operation Controller: CX5000

Main Operation Controller: CX5000

EDA Controller: SW: 01.24.00


Controller Interface, Factory

Interface-A: YES


Controller Interface, System SubComponents

Sub Operation Controller: No SW Rev

DDC Temperature Controller: SW Rev 06.03.00

Process Module Controller: SW Rev 01.12.01

MFC/Pressure Controller: No SW Rev

Gate Drive Unit: No SW Rev

Wafer Handling Controller: SW Rev 02.12.00

Valve/Interlock Control Unit: No SW Rev

Signal Tower (Front): No SW Rev

Signal Tower (Rear): No SW Rev

Transformer (Heater): No SW Rev

Transformer (Controller): No SW Rev

Transformer (Clean Unit): No SW Rev

Safety/Interlock Control Unit: N/A


Controller Interface, Factory

FOUP I/O: QTY=2

FOUP ID READER: RFID on both ports

WAFER MAPPING SENSOR: F3M-S1225

FOUP PRESENCE SENSOR: E3T-ST11

AMHS: N/A

MMHS: N/A

SECS/GEM COMMUNICATION: SW Rev 06.01.02


Damage/Missing parts list

Please inspect tool to reconfirm

System HDD, Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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