Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. TELINDY Plus ALD High-K

Asset ID: 12270

Print spec sheet

Tokyo Electron Ltd.

TELINDY Plus ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: ALDZROX
2.2- General Specification: 
Heater Model - Low-Temp VMM-56-201 4zone/150-600C without  RCU - Qty1
Software Version (WAVES) - Ver. 6.07 - Qty1

3.1.1- Furnace Spec, Furnace: 
Loading Area Light - White (LED) - Qty1

3.1.2- Furnace Spec, Wafer/Carrier Handling: 
Fork Material - Al2O3+PEEK - Qty1

3.1.3- Furnace Spec, Furnace Facilities: 
Furnace Exhaust Connection Poi - Top Connection - Qty1
Cooling Water Connection Point - Bottom Connection - Qty1

3.2.1- Gas Spec,  Gas Distribution System: 
IGS Type - IGS 1.125"W-seal rail-mount - Qty1
IGS Maker - Fujikin - Qty1
Tubing Bends - Bend (Less than 90deg) - Qty1
IGS Final Filter - PALL - Qty1
IGS Regulator - CKD - Qty1
IGS MFC (Maker/Type) - AE / Digital - Qty1
IGS Press. Transducer - NAGANO - Qty1

3.2.2- Gas Spec,  Gas Facilities: 
Gas VENT Connection Point - Bottom Connection - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - Qty1
Exhaust VENT Connection Point - Bottom Connection - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - Qty1
Gas Unit Exh Connection Point - Top Connection - Qty1
Process Gas Exhaust Connection - Bottom Connection - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - Qty1

3.3.1- Exhaust Specificationbution: 
Vacuum Gage - Press Ctrl - MKS (Hot) Capacitance Manometer - Qty1
Vacuum Gage - Press Monitor (1 - MKS (Hot) Capacitance Manometer - Qty1
Vacuum Gage - Pump Monitor - MKS (Hot) Capacitance Manometer - Qty1
Main Valve - CKD-Hi-Speed VEC - Qty1

3.3.1- Exhaust Specification: 
Vacuum Pressure Controller - CKD-VEC - Qty1

3.4.1- Reactor Specification: 
Boat Rotation - Yes - Qty1
Auto Shutter - No Shutter Purge Type - Qty1

3.6.1- Interface Specification, Factory Automation System: 
Carrier ID Reader Writer Type - RF - Qty1
CIDRW Lower Load Port - Read - Qty1

3.6.2- Interface Specification, User Interface: 
Signal Tower Model - LOUGWB-24-4 - OPT: Ordering Fab to verify VAC  signal tower as follows:  QTY=1 is LOUGWB-24-4, QTY=2 is LOUGWB-24-3, Defualt = 1 and note any special requirements within the PO. - Qty1
Signal Tower Colors - Red/Yellow/Green/Blue - OPT: Ordering Fab to verify signal tower as follows:  QTY=1 is Red/Yellow/Green/Blue , QTY=2 is Red/Yellow/Green, Defualt = 1 and note any special requirements within the PO. - Qty1
Signal Tower Location - Front - Qty1
Front Operation Panel - Yes - Qty1
MMI and Gas FlowChart - Gas Box & Front Operation Panel Installed - Qty1
Indicator Type - Superset - Qty1
Operator Switch - Operator Access/Orange (STD) - Qty1
Pressure Display Unit - MPa / Torr - Qty1
Cabinet Exh Pressure Display - Pa - Qty1
Warning Label - English - Qty1

3.7.1- Other Specification, Unit Location: 
Furnace (Exh/Box,Gas/Box inclu - Main-Fab - Qty1
Power Box - Sub-Fab - Qty1

4.0.1- Fixture List, Furnace: 
Mylar floor cutout template - Supplier to deliver 10 weeks prior to ODD - Qty1

4.0.2- Fixture List, Auto Mechanism: 
FORK CLEARANCE CONFIRMATION FI - 1 per tool - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - Qty1

Gas Layout Drawing Parts List: 
HAND VALVE - N11,A11,XZ11 - Qty3 - FUNSDL-21GT-6.35UGC - FUJIKIN
FILTER - N11,A11 - Qty2 - CNF1004USG4 - PALL
FILTER - N12,NC2,N32  N42,N52 - Qty5 - GTMF3700F4A - PALL
REGULATOR - N1 - Qty1 - PGM-H-60-5-1 - CKD
REGULATOR - N2,N9,A1 - Qty3 - PGM-50-5 - CKD
PRESSURE TRANSMITTER - N1,N2,N9,A1 - Qty4 - ZT16-ZW1-D71100(-0.1-0.5MPA) - NAGANO KEIKI
DIGITAL PANEL METER - N1,N2,N9,A1 - Qty4 - K3GN-NEC1-FLK - OMRON
MASS FLOW CONTROLLER - NR - Qty1 - FC-PAR785Y-BW N2 50SCCM - ADVANCED ENERGY
MASS FLOW CONTROLLER - N1 - Qty1 - FC-PAR786YBWN250SLM51850151006 - ADVANCED ENERGY
MASS FLOW CONTROLLER - N2 - Qty1 - FC-PAR785Y-BW N2 500SCCM - ADVANCED ENERGY
MASS FLOW CONTROLLER - NC,N3,N4,N5 - Qty4 - FC-PAR785Y-BW N2 2SLM - ADVANCED ENERGY
MASS FLOW CONTROLLER - N6 - Qty1 - FC-PAR786Y-BW N2 20SLM - ADVANCED ENERGY
MASS FLOW CONTROLLER - N7 - Qty1 - SEC-Z511XC-14W2 N2 2SLM - STEC
MASS FLOW CONTROLLER - N8 - Qty1 - FC-PAR785Y-BW N2 1SLM - ADVANCED ENERGY
AIR OPERATE VALVE - NR1,N11,N61,A11,N21,N31,N41,N51,XZ14,N91,NC1 - Qty12 - FPR-NSD-21-6.35UGC#A - FUJIKIN
AIR OPERATE VALVE - XZ11-13,XZ15 - Qty2 - FPR-NSDT-21-6.35UGC#A - FUJIKIN
AIR OPERATE VALVE - XZ12 - Qty1 - FPR-SDBCT-21RS2-6.35UGC - FUJIKIN
AIR OPERATE VALVE - FN12 - Qty1 - FPR-UDDF-71-9.52-2-NL-PA-UP - FUJIKIN
AIR OPERATE VALVE - XV12 - Qty1 - FPRUDDFTB719.52X6.358NLPAGHHUP - FUJIKIN
CHECK VALVE - N73,N83 - Qty2 - FUNCDF-21-6.35UGC-KA - FUJIKIN
CHECK VALVE - XZ14 - Qty1 - FUCL216.35UGCX6.35UG0.023KAFHX - FUJIKIN
FLOW METER - FM1 - Qty1 - P-821-40-6F-S2-M-N2-20L - TOKYO KEISO
PRESSURE SWITCH - FN1 - Qty1 - EMD7D3P1D100 - YAMAMOTO DENKI
SPEED CONTROLLER - FN1 - Qty1 - AS1001F-06N - SMC
BAKING UNIT - AS102S - Qty1 - AS102S-B5 TDMAS 300SCCM MCAC.5 - ADVANCED ENERGY
CHECK VALVE - A11,N91 - Qty2 - 6L-CW4FR4 - SWAGELOK
PURIFIER - A11,N91 - Qty2 - GLP2INPVMM4 - PALL
MASS FLOW CONTROLLER - A1 - Qty1 - FC-PAR780-4V Ar 2SLM - ADVANCED ENERGY
MASS FLOW CONTROLLER - N9 - Qty1 - FC-PAR780-4V N2 1SLM - ADVANCED ENERGY
AIR OPERATE VALVE - A12,N92 - Qty2 - FPR-SD-71-6.35-2 - FUJIKIN
FLOW METER - FM2 - Qty1 - P-821-40-6F-S2-M-N2-20L - TOKYO KEISO
PRESSURE GAUGE - GJ1 - Qty1 - EMD7D3P1D100 - YAMAMOTO DENKI
SPEED CONTROLLER - GJ1 - Qty1 - AS1001F-06N - SMC
CAPACITANCE MANOMETER - VG4 - Qty1 - 623B-28326 - MKS
AIR OPERATE VALVE - NA1 - Qty1 - FP-71-9.52 - FUJIKIN
PRESSURE SWITCH - P.SW9 - Qty1 - 12SHDN-8A - UNITED ELE
AIR OPERATE VALVE - GJ1A,GJ1B - Qty2 - 955AOPLPNCSC111-VESP-LS - PARKER
AIR OPERATE VALVE - GJ1C - Qty1 - 955AOPLPNCSTS-VESP - PARKER
"SOURCE TANK - BUBBLER - Qty1 - MRCFXX0021398 - PRAXAIR
TECHNOLOGIES"
AIR OPERATE VALVE - XVA,XVB - Qty2 - FPR-UDDF-71RS2-6.35-NL-PA-UP - FUJIKIN
AIR OPERATE VALVE - XVC - Qty1 - FPR-UDDF-TB-71-6.35-NL-PA-UP - FUJIKIN
SOURCE TANK - BUBBLER - Qty1 - OM350 - EPICHEN
HAND VALVE - A21 - Qty1 - FUDDFL-71-6.35-2-UP - FUJIKIN
FILTER - A21 - Qty1 - CNF1004USG4 - PALL
REGULATOR - A2 - Qty1 - SQ60-50-2P-FS-MM-EV - PARKER
PRESSURE TRANSMITTER - A2 - Qty1 - ZT15-6Q6-17110(-0.1-0.5MPA) - NAGANO KEIKI
DIGITAL PANEL METER - A2 - Qty1 - K3GN-NEC1-FLK - OMRON
PURIFIER - A21 - Qty1 - GLP2INPVMM4 - PALL
MASS FLOW CONTROLLER - A2 - Qty1 - FC-PAR780-4V Ar 2SLM - ADVANCED ENERGY
AIR OPERATE VALVE - A21 - Qty1 - FPR-SD-71-6.35 - FUJIKIN
AIR OPERATE VALVE - A22 - Qty1 - FPR-SD-71-6.35-2 - FUJIKIN
AIR OPERATE VALVE - GK1A,GK1B - Qty2 - 955AOPLPNCSC111-VESP-LS - PARKER
AIR OPERATE VALVE - GK1C - Qty1 - 955AOPLPNCSTS-VESP - PARKER
CHECK VALVE - A21 - Qty1 - 6L-CW4FR4 - SWAGELOK
"PRESSURE GAUGE - GK1 - Qty1 - EMD7D3P1D100 - YAMAMOTO
DENKI"
SPEED CONTROLLER - GK1 - Qty1 - AS1001F-06N - SMC
CAPACITANCE MANOMETER - VG6 - Qty1 - 623B-28326 - MKS
"SOURCE TANK - BUBBLER - Qty1 - MRCFXX0021398 - PRAXAIR
TECHNOLOGIES"
FLOW METER - FM3 - Qty1 - P-821-40-6F-S2-M-N2-20L - TOKYO KEISO
REGULATOR UNIT - RG6-BV5 - Qty1 - AC26X-02-X2116 - SMC
PRESSURE SWITCH - P.SW15 - Qty1 - AP-C33P - KEYENCE
HAND VALVE - NA1,O11 - Qty2 - FUDDFL-71-6.35-2-UP - FUJIKIN
FILTER - NA1,O11 - Qty2 - CNF1004USG4 - PALL
REGULATOR - NA - Qty1 - SQ60-100-2P-FS-MM-EV - PARKER
REGULATOR - O1 - Qty1 - SQ140E-100-2P-FS-MM-EV - PARKER
PRESSURE TRANSDUCER - NA,O1 - Qty2 - ZT15-6Q6-17110(-0.1-1.0MPA) - NAGANO KEIKI
DIGITAL PANEL METER - NA,O1 - Qty2 - K3GN-NEC3-FLK - OMRON
AIR OPERATE VALVE - NA2,O12 - Qty2 - FPR-UDDF-71-6.35-2-NL-UP - FUJIKIN
OZONIZER - OZONIZER - Qty1 - AX8575-29 - MKS
BALL VALVE - BV6 - Qty1 - FUBV-915-6.35 - FUJIKIN
REGURATOR - RG7 - Qty1 - R364-02G-ZF - KURODA
PRESSURE SWITCH - P.SW8 - Qty1 - IS1000-01-X302 - KEYENCE
AIR OPERATE VALVE - NG1 - Qty1 - FPR-NHD-219.52UGFX9.52UGPALJM - FUJIKIN
"AIR OPERATE VALVE - NG2-5/NP2-5
/IP2-5 - Qty4 - FBNHDLFS200-9.52X6.35-3B4PALJQ - FUJIKIN"
ORIFICE - NR2 - Qty1 - UJR-6.35RE-RG-0-0.04 - FUJIKIN
AIR OPERATE VALVE - NR2 - Qty1 - FPR-SD-71-6.35 - FUJIKIN
FILTER - NR2 - Qty1 - GSG-V4-1-N - MOTT
"REGULATOR UNIT - RG1-BV1
RG4-BV4 - Qty2 - AC26X-02-X2117 - SMC"
"REGULATOR UNIT - RG2-BV2
RG3-BV3 - Qty2 - AC26X-02-X2116 - SMC"
REGULATOR - RG5 - Qty1 - AR25-02B - SMC
PRESSURE SWITCH - P.SW1,2,4,14,18 - Qty5 - AP-C33P - KEYENCE
HAND VALVE - HV1 - Qty1 - FUBFL-71-9.52-2-PA-BR - FUJIKIN
HAND VALVE - HV2 - Qty1 - FUBFL-71-9.52-2-BR - FUJIKIN
AIR OPERATE VALVE - IV1 - Qty1 - FPR-71RS1-9.52-PA - FUJIKIN
AIR OPERATE VALVE - IV2 - Qty1 - FP-71RS1-6.35-PA - FUJIKIN
AIR OPERATE VALVE - IV7 - Qty1 - FPR-71RS1-9.52-2-PA-BR - FUJIKIN
AIR OPERATE VALVE - VV1,2 - Qty2 - FPR-71-9.52-2-PA-BR - FUJIKIN
AIR OPERATE VALVE - SSV - Qty1 - FPR-71-6.35-2-PA-BR - FUJIKIN
CYLINDER VALVE - MV - Qty1 - VEC-VF8-X0002/VEC-CF8-X0001 - CKD
NEEDLE VALVE - NV1 - Qty1 - FUBFN-71L-6.35-DFZ - FUJIKIN
CHECK VALVE - CV1 - Qty1 - IC8-1/3-VUA-48 - KITZ
CAPACITANCE MANOMETER - VG1 - Qty1 - 631C11T8FHBB - MKS
CAPACITANCE MANOMETER - VG2,P.SW22 - Qty2 - 631C13T8FHBB - MKS
CAPACITANCE MANOMETER - VG3 - Qty1 - 631C12T8FHBB - MKS
PRESSURE SWITCH - P.SW11 - Qty1 - 223B-22809 - MKS
MASS FLOW METER - Z1 - Qty1 - M9861XX0004005L4RHOVVMXT125C04 - BROOKS
AIR OPERATE VALVE - Z11 - Qty1 - FP-71RS1-9.52-2-PA-BR - FUJIKIN
AIR OPERATE VALVE - Z12,Z13 - Qty2 - FPR-TB-71RS1-9.52X6.35-PA-BR - FUJIKIN
DRY PUMP UNIT - TBD - Qty1 - TBD - TBD
BALL VALVE - BV21,22 - Qty2 - G-353011 - IHARA
FILTER - F21,22 - Qty2 - GF-D50L - NIPPON SEISEN
REGULATOR - RG21,22 - Qty2 - RC2000-X0005 - CKD
PRESSURE GAUGE - PG21,22 - Qty2 - G49D-6-P10-P9 - CKD
FLOW CONTROL SYSTEM - NL LA1,2 - Qty1 - KHT-X0062-FL326759 - CKD
FLOW METER - NFA,NFB - Qty2 - KHT-X0071-FL326768 - CKD
"AIR OPERATE VALVE - PB1-NVNFA
PB2-NVNFB - Qty2 - AGD11V-4RJ-X0242 - CKD"
FILTER - F23,24 - Qty2 - VENT-TF7 - NIPPON SEISEN
BALL VALVE - BV23 - Qty1 - G-353219-1/4 - IHARA
REGULATOR - RG23 - Qty1 - 2619-1C-N-P90 - CKD
PRESSURE SWITCH - P.SW21 - Qty1 - PPD3-R10P-6B - CKD
BALL VALVE - BV24 - Qty1 - G-353011 - IHARA
FILTER - F25 - Qty1 - GF-D50L - NIPPON SEISEN
REGULATOR - RG24 - Qty1 - RC2000-X0005 - CKD
PRESSURE GAUGE - PG24 - Qty1 - G49D-6-P10-P9 - CKD
FLOW CONTROL SYSTEM - NBS LA4 - Qty1 - KHT-X0063-FL326760 - CKD
FILTER - F26 - Qty1 - WGMXMBSS4 - ENTEGRIS

Missing/Damaged Parts List:
None report, please inspect tool to reconfirm

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