Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) ALPHA-303i TEOS

Asset ID: 10813

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Tokyo Electron Ltd. (TEL)

ALPHA-303i TEOS

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 6/10/2022

Process: TEOS

System, General Specification

Heater element Model: Mid-Temp VMM-56-002 5zone/500-1000
Process Condition : LP
Maximum Operating Temperature: 1000?
N2 Load Lock : Yes
Wafer Type : 300 SEMI STD-Notch
Qty. of Production Wafers: 117 slots Ladder
Boat Operation : 2 Boat Type / 2 Boat Operation
Software Version: 2.06

System, Furnace

Loading Area Light : White (LED)
Force Air Cooiling system: None
Side Maintenance : None
O2 Density control : NGK
SH-304 STANDRD
N2 Boat shower wafer cooling: installed
Furnace Temperature Controller : M560A

System, Wafer/Carrier Handling

Carrier Type : FOUP 25slots (STD)
Carrier Stage Capacity: 16
WTU Type : 1+4 Edge Grip
WTU alignment: None
WTU Teaching method: None

System, Gas Distribution

IGS Maker / Type : AREA
IGS MFC Maker / Type: AREA(Gas Panel)
IGS Press Transducer Maker / Type: NAGANO

System, Exhaust Specification

Vacuum Gage - 2 torr : None
Vacuum Gage - 10 torr : MYKROLIS
CMLH-31-150S6
Vacuum Gage - 100 torr : None
Vacuum Gage - 1000 torr : MYKROLIS
CMLH-11-150S06"
Main Valve : MKS-99C1274
Pump Maker/Model : EDWARDS
IH-1800"
Low vacuum valve : None
Trap : Disk Trap
Vacuum Pressure Controller: N2-ballast

System, Reactor

Process Tube (LP): Outer: ID448xH1360
Inner: Straig H1340
Outer/Inner Tube Material (LP) : Quartz
Inner Tube Type (AP): None
Inner T/C : Outer Tube interior wall type
Boat Materail/Type : Quartz
117 slots Ladder (8mm pitc
Boat Rotation : installed
Pedestal Materail/Type : Quartz Sand blast
OD300 H350 1fi
Auto Shutter : installed

System, Power Distribution

Voltage 3phase : 208VAC
Voltage Single-phase: 120VAC
Frequency : 60Hz

System, User Interface

Operation Panel : Front/rear Gas Box and Operation Panel Installed
Indicator Type : Superset
Operation software type: Linux

Gas Leak Detector

Gas Leak Detector Materail/Type : Riken
TEOS/CF3

System, Documentation

English Manuals CD-ROM with OEM

System, Fixture List, Gas

IGS maintenance Fixture: None
Vacuum Gauge :
VG2:10to rr
VG3:1000to rr
VG 1000torr

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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