Axcelis Technologies Inc. Fusion 200PCU

Equipment details:

Date of Manufacture: 1999

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hsinchu 300, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Is System On-Line? No

Off-Line Date (if applicable):2017/11

Can Produce Wafers As-Is ? No

CE Mark Certified ? Yes 

Are any Manuals included ? No

OEM Audit Available? Yes 

3rd Party Audit Available ? Yes 

Decontamination Report Exists? No

Any Field Modifications ? Yes  

All Cables present ? No

Any Corrosion visible on modules ? No

Any Missing / Damaged Parts ? Yes  

Shipping Brackets Included ? No

Handler Type:Cassette

Pre-Aligner ? No

Mini-Environment:No

Communication Interface:SECS

Supporting Equipment

Power Supply:N

AC Dist Box:N

Ext Transformer:N

UPS:N

Heat Exchanger / Chiller:N

Backing Pump(s):N

Facility Requirements

CDA:Y

DIW:Y

Vacuum:Y

Gas:N

Power:AC208V 60Hz 21A

Damaged parts as follows,

1.PWR SUPPLY ASSY-PCU 208V 60HZ(POWER BOX)

2.THERMOCHUCK ASSEMBLY

3.AXIS ROOT*3

4.Stage assy

Missing parts as follows,

1.PCB A801 CARD CPU

2.PWB ASY-WAFER

3.A807

4.PWB ASY-DUAL, CASSETTE HANDLER A805

5.ASSY, PWB ASY- M200PC CHUC K CONTRO

6.PCB 

7.A809

8.PWB ASY-640 X 480 GRAPHIC

9.BOARD,PWB ASY-3 AXIS ROBOT BASE

10.PWB ASY - WAFER DETECT 8"/ 25

11.KIT-AIR JET REPLACE LONG B

12.KIT-AIR JET REPLACE SHORTA

13.BULB

14.RF SCREEN

15.PWB ASSY M200PCU CHUCK CONTROL

16.ASSY, PWB ASY, CHUCK INT, 200PCU ON

17.LAMP

18.PHOTOCELL ASY-MOD M150