Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Ebara FREX300S Tungsten

Asset ID: 211005

Print spec sheet

Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

No photos provided by Fab15 due to the tool's conditions.

No shipping kits have been installed on tool.

No missing or damaged parts.


Annotation 2022-06-08 133617.jpg


Annotation 2022-06-08 133734.jpg

Parent CompntPart DescriptionDetailed DescriptionQty
Base SystemFrex 300S4 head 4 platenpolishing system. Dry in Dry out1
Nova 3090 Next ReadyInsitu Metrology System1
Monitor 1 LocationFront of tool1
Monitor 2 LocationCleaner Side of tool1
Monitor 3 LocationCart Mounted on Polishing Side of tool1
Front Light Tower locationLeft Side1
Rear Light Tower locationRight Side1
SoftwareHMIHuman / Machine Interface, Version 8.21
Endpoint Simulation SoftwareME-20, Version 2.4.28.A1
Simulator Software KeyOne Key supplied1
NOVA Interface softwareVia File Server, Version 4.5r6b651
Factory InterfaceWIP Delivery TypeOHT or manual delivery1
CarrierEntegris F3001
E84 PI O Sensors and CablesUPPER E84 Sensors & Cables, with E87 compliance1
E99 Carrier IDSemi ver 0101041
Docked E99 Reading CapabilityFOUP Reader1
Frame ConfigurationMetro ready right side of mini-environment1
Load Port TypesSemi Compliant MENV and FIMS Assmeblies3
Load Port Operator InterfaceStandard1
Operator Access SwitchYes1
Platen APlaten TypeCeramic (SiC), 10-150 RPM1
Platen PadFor shipment only1
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1
Platen End pointRECM & Friction1
Platen Insitu metrologyInsitu metrology0
Slurry DeliveryInjecter + HIC1
Line 150-500ml/min1
Line 250-500ml/min1
Line 3-1
Dresser DIW flow meter.Flow meter1
Platen Cooling Flow MonitorInstalled on the platen cooling return line.1
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1
Platen BPlaten TypeCeramic (SiC), 10-150 RPM1
Platen PadFor shipment only1
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1
Platen End pointRECM & Friction1
Platen Insitu metrologyInsitu metrology0
Slurry DeliveryInjecter + HIC1
Line 150-500ml/min1
Line 250-500ml/min1
Line 3-1
Dresser DIW flow meter.Flow meter1
Platen Cooling Flow MonitorInstalled on the platen cooling return line.1
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1
Platen CPlaten TypeCeramic (SiC), 10-150 RPM1
Platen PadFor shipment only1
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1
Platen End pointRECM & Friction1
Platen Insitu metrologyInsitu metrology0
Slurry DeliveryInjecter + HIC1
Line 150-500ml/min1
Line 250-500ml/min1
Line 3-1
Dresser DIW flow meter.Flow meter with user configurable alarm settings.1
Platen Cooling Flow MonitorInstalled on the platen cooling return line.1
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1
Platen DPlaten TypeCeramic (SiC), 10-150 RPM1
Platen PadFor shipment only1
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1
Platen End pointRECM & Friction1
Platen Insitu metrologyInsitu metrology0
Slurry DeliveryInjecter + HIC1
Line 150-500ml/min1
Line 250-500ml/min1
Line 3-1
Dresser DIW flow meter.Flow meter1
Platen Cooling Flow MonitorInstalled on the platen cooling return line.1
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1
PolisherPolisher TechnologySlurry and Pad1
Polishing Head300mm AI Head Generation Ⅲ1
Pad Wafer Loss SensorLaser type1
Atomizer/Spray BarEbara to provide bracket and atomizer bar.1
AI head flanges pinsSolid pin1
Cleaner ModuleSpecial ChemicalSingle chemical bulk line that will service all modules.1
Cleaner Module 1Roll Roll Cleaner TypeRoll Brush1
Chemical 1 Upper Control ValveRecipe settable flow1
Chemical 1 Lower Control ValveRecipe settable flow1
Chemical 1 Upper Flow MeterUser configurable alarm settings.1
Chemical 1 Lower Flow MeterUser configurable alarm settings.1
Special Chemical UpperNeedle valve1
Special Chemical LowerNeedle valve1
Special Chemical UpperFlow Meter with user configurable alarm settings.1
Special Chemical LowerFlow Meter with user configurable alarm settings.1
MegasonicNozzle1
Bevel Edge CleaningYes1
Cleaner Module 2Roll Roll Cleaner TypeRoll Brush1
Chemical 1 Upper Control ValveRecipe settable flow1
Chemical 1 Lower Control ValveRecipe settable flow1
Chemical 1 Upper Flow MeterUser configurable alarm settings.1
Chemical 1 Lower Flow MeterUser configurable alarm settings.1
Special Chemical UpperNeedle valve1
Special Chemical LowerNeedle valve1
Special Chemical UpperFlow Meter with user configurable alarm settings.1
Special Chemical LowerFlow Meter with user configurable alarm settings.1
MegasonicNo0
Bevel Edge CleaningNo0
Cleaner Module 3Cleaner Type2FJ1
Chemical 1 Upper Control ValveRecipe settable flow1
Chemical 1 Lower Control ValveRecipe settable flow1
Chemical 1 Upper Flow MeterUser configurable alarm settings.1
Chemical 1 Lower Flow MeterUser configurable alarm settings.1
Special Chemical UpperNeedle valve1
Special Chemical LowerNeedle valve1
Special Chemical UpperFlow Meter with user configurable alarm settings.1
Special Chemical LowerFlow Meter with user configurable alarm settings.1
MegasonicNo0
Bevel Edge CleaningNo0
SRDSpin Rinse DryerYes1
Safety PrecautionsFM4910 Compliant> 97% by weight FM 4910 approved materials of construction.1
EPOTwist to release1
Safety labelsEnglish1
Secondary ContainmentAll mechanical connections1
FacilitiesInstallation TypeNot through the wall0
Seismic supportSeismic support points listed1
Chemical ConnectionBottom1
Exhaust ConnectionTop1
Gas ConnectionBottom1
Drain ConnectionBottom1
Bulk Supply RegulationPoint of use regulation for special chemical supply line.1
External PenetrationsBulkhead fitting for inert gas1
External PenetrationsDual containment for liquids1
ChillerCommunication interface1
MetrologyNova Interface requirements 1
DocumentationOperations ManualsCD ROM1
Maintenance ManualsCD ROM1
Electrical DiagramsCD ROM1
Plumbing DiagramsCD ROM1
OEM parts manualsCD ROM1
DocumentationLaserRequired class II documentation1


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