Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Ebara FREX300S

Asset ID: 208469

Print spec sheet

Ebara

FREX300S

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: 1/1/2022

Vendor Tool Serial #  PGA61435WX  
Tool Model  Ebara FREX 300S  
Process  WCMP  
Software Version  11.5  
   208v 30phase 60HZ  
Loading Configuration  3 load ports  metro side mount  
   DescriptionChemicals / Gases Used
Chm/Unit Position   1  Slurry AW7300-A18 
Chm/Unit Position   2  Slurry Bnone 
Chm/Unit Position   3  Slurry CD9228 
Chm/Unit Position   4  nonenone 
Chm/Unit Position ___  Optional Chem0.06% 
Chm/Unit Position ___  Cleaner 2HF 100:1 


Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.