Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Hsinchu 300, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
Date of Last PM : 17th Dec 2015
System is not On-Line
Off-Line Date (if applicable) is June 2016
All Cables are present
Handler Type : Lifter
# of Cassette / FOUP Loaders : 4
Communication Interface is SECS
Facility Requirements :
CDA : 5-7 Kg/ cm2
DIW : 75 PsiG/min
Vacuum : Φ150mm 4M / min
Gas : 2 – 4 Kg/ cm2
Power : 208V 60Hz 304W 150A
The Quartz tube*2 / Quartz boat*2 / Matcher*2 / Screen*3 / ISO*2 / Throttle valve*2 / Lifter arm*1 / PLC CV1000*2 may have been missing or damaging.
Not include the Asyst LPT 2200 SMIF loader*2.
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