Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Canon Surpass 320

Asset ID: 207045

Print spec sheet

Canon

Surpass 320

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

WET - 15-3CAN_SUP_STR_HM - SURP320 -


No photos provided by Fab15 since tool has been de-installed and is stored in an off-site warehouse.

Please inspect to collect photos.

Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.

Two PUMPS are not included in tool for sale.


[Process Chamber 1]

Chamber type : Asher

Gas config. (sccm) = MFC full scale

CF4(100)?H2/N2(2000)?O2(200)?O2(5000)

MW 2.45GHz, Max 5000W

Stage Material : Al + Al2O3

Stage Heater max 300?

Dielectric Substance : Y2O3


[Process Chamber 2]

Chamber type : Asher

Gas config. (sccm) = MFC full scale

CF4(100)?H2/N2(2000)?O2(200)?O2(5000)

MW 2.45GHz, Max 5000W

Stage Material : Al + Al2O3

Stage Heater max 300?

Dielectric Substance : Y2O3

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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