Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

P.S.K. Tech Inc. Supra IV

Asset ID: 12247

Print spec sheet

P.S.K. Tech Inc.

Supra IV

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: STRIP


From original tool PO, please inspect to verify


Main Body

Load Port: Qty 3 Fixed Buffer

System wide corrosion free: Yes(SUS304)

Wafer Breakage Detection: 

LCD Monitor: VX1500M-T


System Controller

CPU: Intel Pentium 4

Hard disk: 80GB (Reference)

1st data back-up: 3.5" FDD

2nd data back-up: CD-RW

Operation Monitor: 15" LCD

Signal Tower: PSK 4 color Dual Polemount Type

R.C.S(Remote Control System): PSK


Utility

Main Power: 3ψ 208VAC 60HZ 250A

UPS Power: 1ψ 208VAC 60HZ 63A

Power Vaccine: 1sec

Electric & signal cable Length: 20M

UPS Battery: YES

Circuit Break Type: MCCB Type

Water Manifold valve: Shut off v/v

All Utility Feed Direction: Bottom-up feed


Transfer module

TM ROBOT Body: SANKYO SR8232-0003AAR

TM ROBOT Controller: SANKYO SC3150

TM ROBOT Power box

EFEM ROBOT: SANKYO SR8240-0001AAS


Chamber 1

APC valve: MKS 653B-4-100-2

APC Controller: MKS 651C-26831

Baratron Sensor: MKS 626A02TBE

Pressure Transducer (pirani): MKS 750B13TCD2GG

EPD Controller: NANOTEK NEFL-309S

Heater Module: WATLOW 

PICP: 5284-3930020-C-S

Generator: MKS AX7690PSK-04

Gas Box: FUJIKIN IGS Type

Pressure Control: Throttle Valve


Chamber 1 process gas line

GAS #1(O2): 10slm AERA TCFC-PA786CT-BF

GAS #2(N2): 3slm AERA TCFC-PA786CT-BF

GAS #4(NH3): 5slm AERA TCFC-PA786CT-BF

GAS #4(H2N2): 5slm AERA TCFC-PA786CT-BF

Purity: 10RA

MFC Signal: Digital

Gas Line Polishing: Electrical Polished

Regulator 

Air Operated Valve: Fujikin

Filter: Millipore

Pressure Transducer: Tem Tech


Chamber 2

APC valve: MKS 653B-4-100-2

APC Controller: MKS 651C-26831

Baratron Sensor: MKS 626A02TBE

Pressure Transducer (pirani): MKS 750B13TCD2GG

EPD Controller: NANOTEK NEFL-309S

Heater Module: WATLOW 

PCIP: 5284-3930020-C-S

Generator: MKS AX7690PSK-04

Gas Box: FUJIKIN IGS Type

Pressure Control: Throttle Valve


Chamber 2 process gas line

GAS #1(O2): 10slm AERA TCFC-PA786CT-BF

GAS #2(N2): 3slm AERA TCFC-PA786CT-BF

GAS #4(NH3): 5slm AERA TCFC-PA786CT-BF

GAS #4(H2N2): 5slm AERA TCFC-PA786CT-BF

Purity: 10RA

MFC Signal: Digital

Gas Line Polishing: Electrical Polished

Regulator

Air Operated Valve: Fujikin 

Filter: Millipore 

Pressure Transducer: Tem Tech 


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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