Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - Wavetek
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Varian Semiconductor Equipment Associates (VSEA)
PVD (Physical Vapor Deposition)
Date of Manufacture: 1992-10-01
Currently Configured for: 150mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hsinchu 308, Taiwan
Available date: Currently Available
Wavetek remarketing equipment not include pump / chiller and Heat exchanger.
Please inspect to confirm configuration and condition and missing or damaged parts.
Module 1
Horizontal Dep:V
Vertical Dep
Heater:V
DC
RF:V
Etch
ConMag II
VersaMag
Turbo Pump:V
Cryo Pump
Module 2
Horizontal Dep:V
Vertical Dep
Heater:V
DC:V
RF
Etch
ConMag II
VersaMag
Turbo Pump
Cryo Pump:V
Module 3
Horizontal Dep:V
Vertical Dep
Heater:V
DC:V
RF
Etch
ConMag II
VersaMag
Turbo Pump
Cryo Pump:V
Module 4
Horizontal Dep:V
Vertical Dep
Heater:V
DC:V
RF
Etch
ConMag II
VersaMag
Turbo Pump
Cryo Pump:V
Module 5
Horizontal Dep:V
Vertical Dep
Heater:V
DC:V
RF
Etch
ConMag II
VersaMag
Turbo Pump
Cryo Pump:V
Recipe Controlled Heaters (Analog Display Eurotherm):Yes
Electro-polished Argon Lines:Yes(VCR)
Turbo Pumped Load Lock:Yes
Slow Vent Load-Lock:No
Load-Lock Rough Pump:Yes
Heat & Polished Load-Lock Seal Door:No
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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