Macquarie Semiconductor and Technology on behalf of Macquarie Electronics USA Inc.

Applied Materials (AMAT) Producer GT Eterna FCVD

Asset ID: 214508

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Applied Materials (AMAT)

Producer GT Eterna FCVD

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: San Jose, United States

Available date: TBD

Tool has been de-installed and s stored in an off-site warehouse.

Fab15’s shipping kits have been installed on FI only. The Fab15 shipping kits are required to return to Fab15.


A HARD DISK DRIVE IS NOT INCLUDED IN TOOL.

Other Missing or damaged parts: Not reported. Please inspect to confirm.


[Chamber A]

Chamber Type:Eterna

Gas Config(sccm)=MFC Full Scale

NH3(1000)/TSA(1000)/H2O(1000)/NH3(1000)/Ar(10000)/He(5000)/O2(250)/Ar(5000)/O2(2500)

RF HF  13.56MHz, max 3kW


[Chamber B]

Chamber type:UV Cure

Gas config. (sccm)=MFC full scale 

NF3(5000)/Ar(5000)Ar(35000)/Ar(2000)/Ar(10000)/O3(30000)

Remote plasma 400kHz,max 10kW


[Chamber C]

Chamber Type:Eterna

Gas Config(sccm)=MFC Full Scale

NH3(1000)/TSA(1000)/H2O(1000)/NH3(1000)/Ar(10000)/He(5000)/O2(250)/Ar(5000)/O2(2500)

RF HF  13.56MHz, max 3kW

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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