Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials Producer GT Eterna FCVD

Asset ID: 19630

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Applied Materials

Producer GT Eterna FCVD

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Tool is config with ETERNA TWIN Chamber A & ETERNA2 UV cure TWIN Chamber B & ETERNA TWIN Chamber C


Basic System : F11 SAXC002

Technology: DCVD

Platform Type: Producer GT


System Software

System software: B5.4_135

FiCGUI: fB5.20_11

GP: 8.10.21.2

DTauMacros: 9.2.44.0


Mainframe Configuration

Robot type: 0190-37624

Robot Blades: 0200-08347

LL preheater: 0090-05793

slit valve door: 3870-05037

MF pump: EBARA EV-100

LL pump: EPX180L(EDWARDS)

Diffucer: 0190-37371


FCVD Chamber Configuration 

Chamber Type: FCVD CHA/C

Blocker: N/A

Liner: 1 Piece

Pedestal: 0010-42919

Slit Valve: 3870-05037(KALREZ 9100)

Filter: N/A

Foreline: 6in

Foreline TV: 3870-06440

Foreline ISO: 3870-06045

Gas box: N/A

Dome: 0041-26595

Baffle : 0021-84368

FACEPLATE: 0041-35370

BLOCKER(gas feed block): 0041-07625

PUMPING LINER: 0021-64960

LINER CERAMIC TOP: 0021-82788

LINER CERAMIC MIDDLE: N/A

LINER CERAMIC BOTTOM(edge ring): 0021-85102

CERAMIC ISOLATOR: N/A

LIFT PINS, FLOATING: 0200-08020

LIFT HOOP: 0200-08334

RPS: 0190-40602

Gas Pallet Type: ETERNA FCVD GT Twin Pallet


Gas Box Configuration

Line 1: N2 PURGE

Line 2: NF3 - 10.0SLM

Line 3: AR - 10.0SLM

Line 4: O2 - 250SCCM

Line 5: O2 - 2.5SLM

Line 6: N2 PURGE

Line 7: TSA - 1.0SLM

Line 8: HE - 5.0SLM

Line 9: EMPTY

Line 10: N2 PURGE

Line 11: NH3 - 700SCCM

Line 12: NH3 - 700SCCM

Line 13: EMPTY

Line 14: H2O - 1.0G

Line 15: AR - 5.0SLM

Line 16: EMPTY

Line 17: EMPTY

Line 18: EMPTY

Line 19: EMPTY

Line 20: EMPTY

Line 21: EMPTY

Line 22: N2 PURGE


UV Chamber Configuration 

Chamber Type: UV Hybrid

LAMPHEAD ASSEMBLY (DUAL): 0190-46008

INNER PRIMARY REFLECTORS (x2): 0200-09730

OUTER PRIMARY REFLECTORS (x2): 0200-09728

UV BULBS (MERCURY BULB x2): 0195-04092

LAMPHEAD ENCLOSURE SEAL: 0021-28691

LAMPHEAD TRAY: 0021-44280

LAMPHEAD TRAY MOUNTING SEAL: 0021-32043

PULLEY ASSEMBLY (ROTATING WHEEL): 0010-44199

LOWER DYNAMIC SEAL: 0190-31840

LOWER CLAMP RING: 0021-33232

SECONDARY REFLECTOR ASSEMBLY: 0041-43990

HOME SENSOR (SIDE 1 ONLY): 0150-18683

HOUSING: 0041-08307

UPPER WINDOW CLAMP SIDE 1: 0041-44565

UPPER WINDOW CLAMP SIDE 2: 0041-44968

QUARTZ WINDOW: 0200-05371 Hereaus (CIP Quartz)

LOWER WINDOW CLAMP: 0041-44966

UPPER SHOWER HEAD: 0200-13516 Hereaus (CIP Quartz)

INTERMEDIATE SHOWER HEAD CLAMP: 0041-44967

LOWER SHOWER HEAD: 0200-13481 Hereaus (CIP Quartz)

LOWER SHOWER HEAD CLAMP: 0021-94083

RF DETECTOR: 0195-06361

LAMPHEAD ROTATOR: 3970-00044

CERAMIC TOP LINER : 0200-10913

INNER PUMPING LINER : 0200-10914

OUTER PUMPING LINER: 0200-10912

ALUMINUM FILLER: 0021-84795

CERAMIC MIDDLE LINER : 0200-13152

CERAMIC BOTTOM LINER : 0200-10944

LIFT PIN (Big foot): 0200-06110

WEIGHT (Big foot): 0200-05795

Ceramic Cap: 0200-05307

WASHER, WAVE, HAYNES: 0021-27777

EQUALIZATION PORT LINER: 0021-94377

PUMPING CHANNEL HUB: 0041-36422

PEDASTAL: 0041-33505

SLIT VALVE DOOR: 0246-18185(Chemraz XPE)

RPS: 0190-40602

UV POWER SUPPER: 0190-44835

Foreline pipeing size: 4''

Foreline TV / ISO COMBO VALVE: 0190-42409

Gas Pallet Type: BIMINI, YAD4, 7STK, REG, PROD GT


Gas Box Configuration 

Line 1: Purge N2

Line 2: NF3, 5slm

Line 3: AR_CLN, 5slm

Line 4: NA

Line 5: AR_TOP, 35slm

Line 6: NA

Line 7: NA

Line 8: NA

Line 9: O3 DIVERT

Line 10: O3, 30slm

Line 11: AR_BTM, 10slm

Line 12: AR_SH, 2slm

Line 13: NA

Line 14: NA

Line 15: NA

Line 16: NA

Line 17: NA

Line 18: NA

Line 19: NA

Line 20: NA

Line 21: NA

Line 22: NA


Heat exchanger

Heat exchanger 1: 0190-27732

Heat exchanger 2: 0190-27732

Heat exchanger 3 (For UV): 0190-32036


Ozone system: 

O3 Generator: 0190-44053

O3 Controller: 0190-38637


Process Pump/Abatement

Pump CHA/C: iXH4550HT

Pump CHB: iXH1820

Scrubber: DAS ESCAPE DUO


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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