Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

LAM Research TCP 9600CFE

Asset ID: 207430

Print spec sheet

LAM Research

TCP 9600CFE

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 1997

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Hsinchu, Taiwan

Available date: Currently Available


Inspect to confirm configuration and condition.

Configuration :

Install Type is Stand Alone.

Last PM date is FEB 2020.

Off-Line date is FEB 2020.

All cables are present.

Handler Type is auto loader.

Robot Type is EQUIP.

End-Effecter Type is standard.

Pre-Aligner is including.

System SW(OS) version is WINDOWS NT.

System SW(APP) version is 825-10494-472-E7.

No SW Options.

SEMI Std Options is E84.

The supporting equipment include the AC Dist Box.

The chuck is ESC type.

The equipment include DSQ chamber.




Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.