Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Lehi, United States
Available date: Currently Available
Tool Status: Shut down. This tool has been harvested and is not guaranteed to be complete, and the Fab is unable to provide a list of missing/needed components. The config provided for the tool is how we purchased the tool and no upgrades/mods were performed post-purchase.
Configuration: Audit to verify.
Tool is a 4-chamber KIYO2300 system on a V2 platform.
| Software Revision | 1.7.3 and above |
| Factory Automation | OHT PIO Sensor |
| AMHS | AMHS - OHT or manual delivery - Factory Interface |
| Carrier | FOUP (Comply with SEMI E47.1 (25wafers)) |
| Inter Face | 3 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies |
| Online Connection | GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx) |
| Platform Type | Version 2 |
| UPS on system | UPS Wiring |
| Earth Leakage Breaker | ELB |
| Monitor | 2 (Flat Panel Display, 1; Front, 1; Side) |
| Signal Tower | Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1) |
| EMO | Front x2, Rear x6 |
| Conditioning Station - A | Conditioning Station - A |
| Conditioning Station - B | Conditioning Station - B |
| Foreline | Heated |
| Sub-panel | Dual Drop Sub-panel Remote Power Distribution Box (RPDB) |
| Interconnect Cables | TM to sub-panel, 50 ft |
| Pump to TCU | 50 ft |
| TCU to PM | 50 ft |
| Pump to PM | 50 ft |
| PM to Gas Box | 16 ft |
| TCU to RPDB | 50 ft |
| Pump to RPDB | 50 ft |
| Inter Locks | Gas Box Door (I/L Signal is sent to the Factory) |
| Inter Locks | External (When the I/L signal is received from Factory, gas valves are closed) |
| Front Fascia | Bulkhead Configuration |
| Chiller Lower | ATS Dex 20A |
| Coolant | FC3283 |
| Chiller Hose | 5/8 ID Braided |
| RF Generator Bias | RF GENERATOR,13.56MHZ,1.5KW,PULSE |
| RF Generator Source | GEN,APEX,1.5KW,13.56MHz,F47,H,P4,-2000Hz |
| 8 ft Bias RF Pulsing Cable | CA,COAX,RF,HN-90, 8ft BIAS |
| RF Source Cable 21 Feet | CA,COAX,RF,HN-90,TO,HN-90,21FT |
| Bias Match (FRU) | FRU,ASSY,BIAS MTCH,2300 FOR SAMPLE/HOLD |
| TCP Match (FRU) | CONTA,ENCL,TCCT CER,2300 |
| Coil Assembly | ASSY,TCP COIL,TCCT CER,2300 |
| VCI | ASSY,VCI 2300 20-800V,DUAL,FAST,PULSE |
| PCB | ASSY,PCB,PWR SPLY,ESC,BICEP,HV-RP |
| PCB | PCBA,ESC FILTER, BICEP DC-PROBE |
| PCB | ASSY,PCB,HEATER FILTER |
| PCB | PCBA,VIOP III BOARD |
| PCB | CPU PCB |
| PCB | SPCTRMTR,FIBEROPTIC,LOW 2ND ORDER |
| Wafer ID Reader | WIDS Bottom Read |
| Carrier ID Reader | Asyst RF Advantag |
| EIM Server | EIM Server-One EIM server per 10 frames with additional primary EIM server. |
| Process Chbr 1,2,3,4 | 2300 Kiyo |
| ESC, Assy | ESC,TUNABLE,COUL,CNTR RF,300MM |
| ESC RF Grounding Strap | ESC RF Grounding Strap |
| AC Box | ASSY,ENCL,AC,2300 PM,4-ZONE,ESC |
| TMP | PMP,VAC,TURBO,2.7K L/S,ISO 250,ROHS |
| Dry Pump | Adixen (Alcatel) A1003P |
| Transfer Module Backing Pump | EPX with N2 Gas Module |
| RCKR VLV | RCKR VLV Longer Life Air Cylinders |
| Pressure Monitor | MNMTR,ETCH,100MT |
| Pressure Monitor | MNMTR,2STPT,100 DEG C,KF16,10T |
| Pressure Monitor | MNMTR,2STPT,100 DEG C,KF16,10T |
| Pressure Monitor | SW VAC 75 TORR |
| Pressure Monitor | SWITCH, ATMOSPHERIC W/.25ID |
| Pressure Monitor | CNTRLR,FLOW AND PRESSURE,649A |
| O-Rings | Chemraz |
| Chamber Isolation Valve | Barrier Seal Door |
| VAT Valve O-rings | Valqua |
| Wafer Lift Mechanism | Prime Movers With Pin Speed Mod |
| RF Ground Bracket | BRKT,RF GND,BIAS ELECT ASSY |
| ESC Hose Kit | Low Temp |
| TCW Kit | KIT,WINDOW,TEMPERATURE CONTROL |
| TCW Kit | PCBA,ASSY,PCB,OT MODULE |
| Gas line 1 | SiCL4 100 sccm- STEC Z313 |
| Gas line 2 | BCL3 300 sccm STEC Z313 |
| Gas line 3 | CL2 500 sccm- STEC D213 |
| Gas line 4 | HBr 500 sccm- STEC D213 |
| Gas line 5 | CF4 400 sccm- STEC D213 |
| Gas line 6 | O2 500 sccm-STEC D213 |
| Gas line 7 | Empty (for future use) |
| Gas line 8 | He 500 sccm- STEC Z313 |
| Gas line 9 | Empty (for future use) |
| Gas line 10 | CH2F2 200 sccm- STEC D213 |
| Gas line 11 | Ar 1000 sccm- STEC D213 |
| Gas line 12 | HeO2 (30% O2) 50 sccm- Z313 |
| Gas line 13 | NF3 1000 sccm- STEC D213 |
| Gas line 14 | N2 (Process Grade) 250 sccm- STEC Z313 |
| Gas line 15 | Empty (for future use) |
| Gas line 16 | SO2 200 sccm- STEC Z313 |
| Purge | N2 (Process Grade N2) (Customer Supplied) |
| Filter | Final gas : Mykrolis (P/N WG2FT1RR2) |
| Filter | FLTR,Wafergard,PTFE,VCR,MALE |
| Gas Box Inlet Option | Regulated Inlet Gas Panel |
| Non-standard PM/GB Feature | IGS GAS BOX/ with GIB option 1-16 Hasteloy single lines |
| Gas Line Pressure Transducer | Active pressure transducer WITHOUT digital readout. |
| Regulator | SQMICRO (VERIFLO) RGLTR_DM_S__NI FLTR_60 PSIG_5RA |
| Piping | Single Contain-Hasteloy, Gas box to Final valve & Exhaust through Gas box) |
| Final Pressure Switch | SW,PRESS,400 Torr decreasing |
| Heated Lines | Lines 1 & 2 heated |
| LIN,SYM,HI FLOW | LIN,SYM,HI FLOW |
| KIT,LINER AND DOOR | KIT,LINER AND DOOR |
| WDO,CER,LLT,CTD,BAYONET,2300 | WDO,CER,LLT,CTD,BAYONET,2300 |
| RING,EDGE,TOP,CER,EBP,300MM | RING,EDGE,TOP,CER,EBP,300MM |
| RING,EDGE,BOT,CER,200-300MM | RING,EDGE,BOT,CER,200-300MM |
| WDO, SAPPHIRE, 25MMX.087 | WDO, SAPPHIRE, 25MMX.087 |
| INJ,DUAL,FACSEAL,IEP,HNYCMB,CE | INJ,DUAL,FACSEAL,IEP,HNYCMB,CE |
| SHLDASSY,INJ SHEILD NUT,BAYONE | SHLDASSY,INJ SHEILD NUT,BAYONE |
| WDO, QUARTZ | WDO, QUARTZ |
| Top Chamber ACME Coated | Top Chamber ACME Coated,TCW |
| WLDMT,INTFC,CHMBR SEPERATE,NOZ | WLDMT,INTFC,CHMBR SEPERATE,NOZ |
| Insulator Ring: Ceramic | Insulator Ring: Ceramic |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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