Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Varian Semiconductor Equipment Associates (VSEA) VIISta HC

Asset ID: 210306

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Varian Semiconductor Equipment Associates (VSEA)

VIISta HC

High Current Implanter

Ion Implanters

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Software Version VCS 7.67
System Power Rating208 VAC
Loading Configuration4 Loadport
Gases Used
Ar
BF3
AsH3
PH3
Module
Common/Area SpecificComponentSub-componentCheckpointSpecPower upResultJudgement
(Y/N) 
Frontend interfaceCommonLoad PortStageParticle, rusting partsNo visual particle & rusty partsYFixload 6MOK
  Barcode readerParticle, rusting, motionNo visual particle & rusty partsY OK
  DoorParticle, rusting, motionNo visual particle & rusty partsY OK
CommonFI RobotBladeCrackingNo damageYBrooks DBMOK
  End effectorWearingNo damageY OK
  BoltsRustingNo rustyY OK
  RobotMotionNo alarm when tool execute initial Y OK
Load LockIMP SpecificDoorO-ringVisually check not cracking and corrosionsurface no damageY OK
IMP SpecificElevator Drive ShaftVisually check not cracking and rustingVisually check not cracking and rustingY OK
IMP Specific lead screwVisually check not cracking and rustingVisually check not cracking and rustingY OK
IMP SpecificCassette PlatformCassette Sense cableVisually check not crackingCable condition (破皮)Y OK
Process ChamberIMP SpecificAir BearingAir Bearing shaftVisually check not cracking and rustingFunction Y OK
 Vacuum burstCycle test and check IG3 burst within 5e-7Pressure gap < 5e-7 torr when Air bearing function workY OK
PFGPFGwater cooling quick connector not leakNo leakageY OK
Base VacuumIG3Shutdown beam within 5e-7 torrPressure gap < 5e-7 torr when beam shut downY OK
Profilershaft Visually check not cracking and corrosionVisually check not cracking and corrosionY OK
 Vacuum burstCycle test and check IG3 burst within 5e-7Cycle test and check IG3 burst within 5e-7Y OK
Incident Angle Cupwater tubeNo leakCheck dose cup cable conditionY OK
 Siginal cableVisually check not cracking and corrosionCheck dose cup cable conditionY OK
Source SubsystemIMP SpecificGas BoxGas sticksVisually check not cracking and corrosion YAr, BF3, AsH3, PH3OK
IMP Specific Bottle clamperVisually check not cracking and shortage Y OK
IMP Specific Exhaust hose tube Visually check not crackingCheck door interlockY OK
IMP SpecificManipulatorAssemblyVisually check not cracking and shortage Y  
IMP Specific Source coverVisually check not cracking and shortage Y OK
IMP Specific  Safety switch, not bypasee and push Y OK
with dscouraged 
IMP SpecificFilementCables conditionConnector & cable not cracking Y OK
 IMP SpecificResolving ApertureAssemblyVisually check not cracking and shortage Y OK
IMP SpecificSetup CupAssemblyVisually check not cracking and shortage Y OK
IMP Specific Vacuum(IG2)in & out vacuum no changeIG2 vacuum < 5e-7Y OK
IMP SpecificQ2 & Q3AssemblyVisually check not cracking and shortage Y OK
IMP Specific quick connecorNo water leak Y OK
IMP Specific interlock Switch Visually check not cracking and shortage Y OK
Support SubsystemIMP SpecificControl Subsystemlightlink comninationall loop need get 1st priority loop Y OK
IMP Specific KVM switch functionmake sure IAN & NCS can switch Y oK
IMP SpecificRemote ChillerNot water leakVisually check Water tray Y OK
IMP Specific Tempture controlManual set to15  ֯CConfirm chiller cool down to 15 degreeY OK
IMP SpecificCryo Pumpspumpnot noise when running YOBIS 320 FEOK
IMP Specific compressorhilum presure  YIS-1000OK
IMP Specific  Not water leak Y OK
IMP SpecificRoughing PumppumpNot water leak YWas originally Ebara A10S, Not includedOK
IMP SpecificenclosureDoors & panelsFunction normal no cracking & rusting Y OK
IMP Specific HV light(if have)Function normal Y  
IMP Specific Componentno shortage parts Y OK
IMP Specific Ground handle Barno shortage parts Y OK
IMP Specific Gas Box Ground shouting BarsVisually check not cracking Y OK
IMP Specific 90 Ground shouting BarsVisually check not cracking Y OK
IMP Specific 70 Ground shouting BarsVisually check not cracking Y OK
IMP Specific 70/90 Shorting barsVisually check not cracking Y OK
IMP Specific D2S Shorting BarVisually check not cracking Y OK
IMP Specific Isolation feet(gas box.70.90)Visually check not cracking Y OK
IMP SpecificWater systemPump not leak Y OK
IMP Specific Filter not leak Y OK
IMP Specific All Zones manifoldnot leak Y OK
IMP Specific Flow sensor not bypasscheck universal setting Y OK
IMP SpecificSafetyEMO buttonsVisually check not cracking Y OK
ES137172 Packing List - verified on 1/28/2021
  
Crate #1 90 module with beam line, exhaust line  
Crate #2 Main facility PD  
Crate #3 70 Module  
Crate #4 End Station  
Crate #5 Buffer  
Crate #6 Enclosure Door #3 (Panel, Source Housing)  
Crate #7 Enclosure Door #1 (Side Panel, covers)  
Crate #8 Enclosure Door #2 (Roof Panel, cable tray)  
Crate #9 Main Body Plate #1  
Crate #10 Main Body Plate #2 Crate #11 Facility Cooling Exhaust  
Crate #12 GasBox  
Crate #13 Chiller, 70 Transformer  
Crate #14 Main Transformer, Helium Line  
Crate #15 Cryo Compressor  
Crate #16 Remote PDU  
Crate #17 Boxes x 7 Crate #18 Facility Cooling Exhaust Dock  
Crate #19 V4 cover, 70 waveguide, scan cover, covers, Profiler  
two additional crates  :   
One had six OBIS 320FE cryo pumps  
Second crate had four STP A2203C turbo pumps  
Three cryo pumps and two turbo pumps need to be serparated   
and joined to main tools  


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