Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Novellus Systems Inc. Concept Three Speed MAX Lite

Asset ID: 67452

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Novellus Systems Inc.

Concept Three Speed MAX Lite

HDP CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Process: STI

Software Version: 5.73B78P3

System Power Rating: 208 AC 3-Phase

Loading Configuration: 3load port(Brooks)


Chm Position 1: C3 SPEED MAX LITE CHA; Chemicals / Gases Used: N2,AR,O2,He,SiH4,H2,NF3

Chm Position 2: C3 SPEED MAX LITE CHB; Chemicals / Gases Used: N2,AR,O2,He,SiH4,H2,NF3

Chm Position 3: C3 SPEED MAX LITE CHC; Chemicals / Gases Used: N2,AR,O2,He,SiH4,H2,NF3


Damage/Missing parts list

missing- CHA Process Vacuum Pump ADS1202H

missing-CHB Process Vacuum Pump ADS1202H

missing-CHC Process Vacuum Pump ADS1202H

missing-LL-System Pump BOC Edwards GX600N

missing-DAS escape Scrubber

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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