Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards iH600

Asset ID: 209430

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Edwards

iH600

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 10- Not overhaul (pump controller is not included)


AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FS600-333N3A52BE04360037979902FAB AFAB A
FS600-333N3A52BE04490056036839FAB AFAB A
FS600-333N 46282271FAB AFAB A
FS600-333N3A52BE04210037920341FAB AFAB A
FS600-333N3A52BE04070037913344FAB AFAB A
FS600-333N3A52BE040300037907657(037910795)FAB AFAB A
FS600-333N3A52BE04270037921056A15-10.5FAB B
FS600-333N3A52BE04450037978060A17-3FAB B
FS600-333N3A52BE04240037917719A17-3FAB B
FS600-333N3A52BE04320037915719A12-1.5FAB B


Technical data :

60 Hz Peak speed (m3 /h) : 600

60 Hz Ultimate vacuum (torr) : 5.3 x 10-4

50 Hz Peak speed (m3 /h) : 518

50 Hz Ultimate pressure (torr) : 1.5 x 10-3

Typical shaft seal nitrogen flow (slm) : 4

Cooling typical water flow at 15psi drop: 4 l/mn

Oil capacity : 1.43 l

Inlet connection : ISO100

Outlet connection : NW40

Noise Level : <69 dB(A)

Weight : 415 kg

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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