Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards GX600N

Asset ID: 209424

Print spec sheet



Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 28- Not overhaul (pump controller is not included)

AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FSGX600NN3DJY40203000109323767A6.5-4.5FAB B
FSGX600NN 99313596A6.5-4.5FAB B
FSGX600NN3DJY40202800109323776A6.5-4.5FAB B
FSGX600NN3DJY40204000109324227A6.5-4.5FAB B
FSGX600NN3D52BE128600109316146A6.5-4.5FAB B
FSGX600NN3D52BE126200109316165A6.5-4.5FAB B
FSGX600NN3D52BE126600109315974A6.5-4.5FAB B
FSGX600NN3D52BE12270099314526A6.5-4.5FAB B
FSGX600NN3DJY40205000109324224A6.5-4.5FAB B
FSGX600NN3D52BE127100109316174A6.5-4.5FAB B
FSGX600NN3D52BE126900109315965A6.5-4.5FAB B
FSGX600NN3DJY40204600109324050A6.5-4.5FAB B
FSGX600NN3D52BE126400109316168A6.5-4.5FAB B
FSGX600NN 109317292A6.5-4.5FAB B
FSGX600NN 109317295A6.5-4.5FAB B
FSGX600NN3DJY40204800109324059A6-5FAB B
FSGX600NN 109324130A6-5FAB B
FSGX600NN3D52BE12150099313539A6-5FAB B
FSGX600NN3D52BE128100109315946A6-5FAB B
FSGX600NN3D52BE12220099314922A6-5FAB B
FSGX600NN3D52BE126100109315977A6-5FAB B
FSGX600NN3D52BE127700109317733A6-5FAB B
FSGX600NN3D52BE12210099314629A6-5FAB B
FSGX600NN3D52BE14030099312511A18.5-8.5FAB C
FSGX600NN3D52BE14040099312520A18.5-8.5FAB C
FSGX600NN3D52BE142100109316743A18.5-8.5FAB C
FSGX600NN3DJY4020D000109324217A18.5-8.5FAB C
FSGX600NN3D52BE12110099313507A17-8.5FAB C

Technical Data


Peak speed 620 m 3 h -1 365 ft 3 min -1 10333 lmin -1

Ultimate pressure 7 x 10 -4 mbar 5.25 x 10 -4 Torr 0.07 Pa

Power at 700 Torr exhaust

Ultimate 1.6 kW

AUC (Active Utility Controller) 0.05 kW

Water * Water inlet 2 slm

Nitrogen 0 slm

Installation Details

Footprint (excluding exhaust) 0.20 m 2

Weight 220 kg

Inlet connection ISO 100

Outlet connection NW25

Noise at ultimate <55 dB(A)

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