Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards IH1800

Asset ID: 207279

Print spec sheet

Edwards

IH1800

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 6- Not overhaul (pump controller is not included)


Asset descriptionFixed Asset NumberS/Nlocation
1800-333NA037915618A22-5
1800-3333A52BE033400037917264A21-3
1800-3333A52BE032300046307530A20-2
1800-333NA046288153A6.5-12
1800-3433A52BE031500037910066Fab A
1800-343NA037928256A22-8



Technical data :

Mass (excluding packaging) : 502 kg

Vibration level at inlet : <1.8 mm s-1

Typical peak pumping speed : 1800 m3 h-1

Ultimate (shaft seal purge only) : 1x10-3 mbar

Inlet/Outlet Connection : ISO160 / NW40

Extraction port : 50 mm dia

Minimum cooling water flow rate required : 4 l min-1

Noise dB (A) : <69

Dimensions (L ( to exhaust enclosure) x W x H (to inverter))* : 986 (1059) x 470 x 888 (1094) mm


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