Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Location of Equipment: Boise, United States
Available date: Currently Available
Tool Status: Pump has been shut down, disconnected, and moved to the warehouse.
Configuration. Audit to verify.
Pump has not been refurbished and is not skidded or crated.
Peak pumping speed N2 : 3,950 m3/h
Peak Pumping Speed H2 : 3,700 m3/h
Typ. Ultimate pressure (no purge) 50/60 Hz : 2.10-4 / 0.15 mbar / mtorr
Typ. Ultimate pressure (purge 50 slm) 50/60 Hz : < 1.10-3 / < 0.75 mbar / mtorr
Max. Pumping Speed : 3950 m3/hr
Exhaust Connection : ISO KF40
Inlet Connection : ISO K 160
Depth x Height x Width : 1455 x 1544 x 770 mm
Power Requirements : 208/220V or 380-480V 3 phases 50/60 Hz
Weight : 590 kg +560 kg
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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