Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

LAM Research 2300 Exelan Flex 45

Asset ID: 211045

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LAM Research

2300 Exelan Flex 45

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2007

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 6/30/2023



Section 2: Tool Specific Information
OEMLAM
Tool ModelFlex45 Talon
Software Version (include revision #)1.8.4 - SP5-HF1
System Power Rating200 AC 3-Phase
Loading Configuration3 load ports


Chamber DescriptionChamber Chemicals Gases Used
Chamber 1Flex45 TalonC4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2
Chamber 2Flex45 TalonC4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2
Chamber 3Flex45 TalonC4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2


Optional GasCustom Gas LinesTOR
Gas Line 1C4F850
Gas Line 2CF4200
Gas Line 3O23000
Gas Line 4Ar1000
Gas Line 5CO500
Gas Line 6CH3F100
Gas Line 7O230
Gas Line 8CHF3100
Gas Line 9O2300
Gas Line 10Xe500
Gas Line 11C4F650
Gas Line 12CH2F2100
Gas Line 13N21000
Gas Line 14Not use
Gas Line 15Not use
Gas Line 16Not use
Tuning Gas 1O210
Side He BallastHe(300) STEC D219He 300


Section 3. Missing / Defective
DescriptionMissing (Qty)Defective (Qty)
NA





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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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