Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Applied Materials (AMAT) Producer Etch XT Dielectric

Asset ID: 16107

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Applied Materials (AMAT)

Producer Etch XT Dielectric

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: TBD

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available


System:EKA101
Project:414248
MES:APOXL10100
Mainframe Type: Platform:Producer eXT MF
SW Version:B3.1_65

Server Type
FE:306M
FI:306M
RT:SBC

Chamber Type
A:Twin- (EO2) DIELECTRIC ETCH TWIN XT
C:Twin- (EO2) DIELECTRIC ETCH TWIN XT

Customer ID:EKA101
Project ID(AMAT):414248NSO
Warranty end date: 01/28/09
Application (Process):Oxdie
FI robot Type:YASKAWA AT
Robot P/N: 0190-14738
Controller P/N: 0190-27387
Robot Type:VXP
Materials:Aluminum
Robot P/N:0010-30160
Controller P/N:0190-10119 / 0190-10118
 

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