Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Applied Materials (AMAT) Centura ACP DPN Plus Gate Stack

Asset ID: 10497

Print spec sheet

Applied Materials (AMAT)

Centura ACP DPN Plus Gate Stack

Decoupled Plasma Nitride

Deposition Equipment

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: 12/19/2022

This tool has 2 DPN and 2 PNA chambers.


APPLIED CENTURA ACP GATE STACK TPACP2XCENTURA

FEP CENTURA ACP GATE 300MM FlTEM F-GATEACP

APPLICATION

Centura ACP Gate Nitridation DRAM System 0465-95018

Centura ACP Four Facet Mainframe 0465-95050

(0746) - DPNPLUS 0465-95054

(R741) - RTP Radiance RP Chamber 0465-95058

APPLICATION OPTIONS

DPN CHAMBER FAMILY OPTIONS

Generator, Enhanced Pulsed RF 0465-95201

RTP RADIANCE CHAMBER

Technology Option, Open Loop Tuner 0465-95301

Process Application, PNA 0465-95305


OTHER OPTIONS

FACTORY INTERFACE OPTIONS

Configurable Colored Lights 0395-00642

Operator Access Switch 0395-00114

TIRIS with RF E99 Carrier ID 0395-09071

Docking Range Shield 0395-09021

Single Axis Aligner 0395-00602

REMOTE OPTIONS

Through the Wall 17in Rat Panel 0395-09068

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