Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)


Asset ID: 209436

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Chemical/Gas Treatment System

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Excess itemsVendorModelQty
AbatementDASEscape DUO10
AreaVendorTypeModeloverhaulS/NBonded No.Fixed Asset No.location
FSTDASabatementESCAPE DUOdone PM03/07/51694N/AC10103R00129-0A1-1F
FSTDASabatementESCAPE DUOdone PM03/07/51693N/AC10103R00128-0A1-1F
FSTDASabatementESCAPE DUOdone PM03/07/51700N/AC10203R00162-0A1-1F
FSTDASabatementESCAPE DUOdone PM03/07/51635N/AC10203R00168-0A1-1F
FSTDASabatementESCAPE DUOdone PMAD3-14-3260DS140761N/AA1-1F
FSTDASabatementESCAPE DUOdone PMAD3-14-3129DS1401931205841-0A1-4F
FSTDASabatementESCAPE DUOdone PMAD3-15-3784DS1505071249448-0A1-4F
FSTDASabatementESCAPE DUOdone PMAD3-17-5083DS1717591287117-0A1-4F
FSTDASabatementESCAPE DUOdone PM03/07/51468N/AC10103R00053-0A2-1F
FSTDASabatementESCAPE DUOdone PMAD3-15-3978DS1606621253733-0A2-1F

Technical Data

  • Dimensions (W x D x H): 1650 mm x 675 mm x 1800/2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 4x DN25 or DN40
  • Gas outlet: max. 2 x DN100


  • Up to 2 independent waste gas and backup lines per reactor
  • Operation time > 99% through backup function
  • Second reactor allows uninterrupted operation during maintenance
  • Runs with different fuel gases and scrubber liquids
  • Low water consumption through closed-loop design
  • Available in two sizes

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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