Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Lehi, United States
Available date: Currently Available
| Tool Model | FC-3100 | ||||
| Process | ADDSC1 | ||||
| Software Version | FC31-23.0A006 | ||||
| System Power Rating | 208 AC 3 Phase for System | (eg. 110 AC 3-Phase for System) | |||
| Loading Configuration | 2 Load Ports | (eg. 6 load positions for furnace or dual auto-indexer loaders) | |||
| Description | Chemicals / Gases Used | ||||
| Tank 1 | CHB | TMAH/APM | |||
| Tank 2 | ONB | HF, NH4OH, H2O2 | |||
| Tank 3 | CHB | TMAH/APM | |||
| Tank 4 | ONB | HF, NH4OH, H2O2 | |||
| Dryer 1 | LPD | HF, IPA, N2 | |||
| Dryer 2 | LPD | HF, IPA, N2 | |||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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