Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
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Date of Manufacture: 2005-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
CMP 06-3EBRA_300SG2_W_01 EBARA 300SG2 W
| Section 1. Tool General Information | |||
| Micron MISTI/LID # | EBF36K4800 | ||
| Vendor Tool Serial # | PGA51262WX | ||
| Month / Year of Tool Move In (MM/YYYY) | 1-Aug-06 | ||
| Tool Excess Date (MM/DD/YYYY) | 1-Apr-21 | ||
| Tool Current Status | In production | ||
| Tool working condition before deinstall | Working | ||
| Tool Location | Cleanroom | ||
| Any modification/conversion/refrofit was perform to the tool? | Yes | ||
| Section 2. Move-out constraint | |||
| Any layout/move-out path constraint | No | ||
| If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap. | |||
| Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer. | |||
| Section 3. Tool Specific Information | |||
| OEM | EBARA | ||
| Tool Model | F-REX300S | ||
| Process | Metal | ||
| Software Version (include revision #) | 11.6 | ||
| System Power Rating | 208v 3 Ø 60Hz | ||
| Loading Configuration | 3 loadports (Asyst IsoPort) | ||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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