Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2006-10-15
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Greensboro, United States
Available date: Currently Available
| 4473 | |||
| 8/28/21 - Qpm | 11/4/2021 - Apm | 2/7/2022 - Qpm | |
| R/B Disto: | |||
| NCE X (nm) | 46.5 | 45.7 | 46.2 |
| NCE Y (nm) | 45.6 | 51.9 | 56.3 |
| Focal: | |||
| Focus (nm) | -0.102 | 0.025 | 0.048 |
| Rx (urad) | -4.707 | 5.964 | 0.877 |
| Ry (urad) | 4.847 | -3.871 | 1.188 |
| FPD (um) | 0.319 | 0.313 | 0.333 |
| Astig (um) | 0.267 | 0.291 | 0.302 |
| Illumination: | |||
| Uniformity: (%) | 1.19% @ 932 | 1.15% @ 897 | 1.07% @ 991 |
| Straylight: (%) | 4.29% | 4.32% | 4.27% |
FILE_TYPE 03
MACHINE_NUMBER 4473
MACHINE_TYPE /100
COMMENT TZ=factory
SW_RELEASE 080900
MAGIC_STRING Nkk6WFU0{Ud
WAFER_STEPPER
OPTIONS
REFL_IMAGE_SENSOR KEY F0yLW1u|SL|
ARMS KEY pS4GaZvznx{
PEP_1_PRODUCTIVITY_UPGRADE KEY b1TEwVDpCIh
PEP_2_PRODUCTIVITY_UPGRADE KEY 4fp{lpSzgDE
RETICLE_ERROR_COMPENSATION KEY ezPz6VMFY8K
LSQ_DISTO_MODEL KEY UXGjaAJQxRx
MARK_SENSOR KEY ElVc1Qr|e6Z
BATCH_STREAMING KEY clTcB0{qkKB
INTENSITY_2 KEY H|w4XNMDFgs
FAST_TTL_ALIGNMENT KEY knvzCZ4n5Ad
THREE_INCH_WAFER KEY Ri49{AJfvxl
PEP_LEVEL_ALIGNMENT_1 KEY R94FykGXvxl
PEP_WAFER_SWAP_4 KEY VpvuZu0eZN1
SCRIBELANE_MARKS KEY sJukj{zYm1U
LIBRARY_CONFIG_3 KEY zcHKXcHWkvw
VISUAL_ALIGNMENT_CAMERA KEY 4{lw|||DgJI
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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