Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
WCVD (Chemical Vapor Deposition)
Date of Manufacture: 2008
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: C3ALTUS
Loading Configuration: 3 load ports
Chamber 1:C3 ALTUS CHA; Chamber Chemicals Gases Used: Ar/SiH4/H2/WF6/NF3/B2H6/N2
Chamber 2:C3 ALTUS CHB; Chamber Chemicals Gases Used: Ar/SiH4/H2/WF6/NF3/B2H6/N2
Facility & Interface
Altus Module Locations: Dual
WTS(backbone) Facilities Connection Configuration: Bottom Facilities Installation
Remote Interconnect Cables: 75 feet
4 Color Flush Mount Signal Tower: 34-291897-04
Factory Automation Interface (Over Head Transport), [E84 AMHS Protocal]: E84 controller 02-321482-00 /E84 cable 03-160683-00
WTS Frame: 3 FOUP, IMM, F47
2 FOUP or 3 FOUP Front End Interface: 3 FOUP
Fixload FOUP RF ID Reader: READER,RFID,OMRON V640-HS61 27-327806-00
Fixload Firmware: Rev 2.9
Remote Back End User Interface (Ergotron): 04-346723-00
Primary Front End User Interface Position: Right
Modular Power Distribution, [MPD,DUAL, ALTUS,C3PDP]: 01-296434-03
Front End (backbone)
ATM Robot Kit (Traverser, Robot, Controller), [Reliance]: Traverser 02-320123-00/Robot 02-343723-00/Controller 02-343877-00
ATM Robot Firmware (for friction end effector): 1.47
ATM Robot End Effector (Friction Type): 15-360099-01
Transfer Module Robot With Leapfrong Armset, [Mag7]: DRIVE UNIT 27-355276-00/Arm set 63-263892-00
Transfer Module to Chamber Valve (SMC Valve): 63-294083-02
Cooling Pedestals in Loadlocks: 02-307891-01 Right 02-307891-02 Left
Throttle Valve, WTS: 60-100802-00
Loadlock ATM Gate Valve, VAT: 63-328046-00
Loadlock Vacuum Gate Valve, VAT: 60-309252-00
Leak check shut-off valve (attach to existing KF-40): 04-110786-00
Readiness Kit (If ordered as a single Altus): NA
Mini Environment AWC: Installed
Transfer Module AWC (LED), [SENSOR XMITTER/SNS RECIEVER]: 03-257256-00\03-257257-00
IMM Ready (IMM Mount, cabling, 17" UI, Traverser, etc): NO
Software/Controls
Module Controller Type: 02-321865-00
System Controller Type: 61-311719-00
System Software (Proteus): 2.652 B35
System Software (QNX): 5.83 B22
WTS IOC: Firmware
0: HDESIOC/1.309
1: N/A
E84/AWC: HDESIOC/1.407
Altus IOC: Firmware
0: ESIOC Firmware 1.309
1: ESIOC Firmware 1.309
2: ESIOC Firmware 1.309
Chase UI Computer: 04-346723-00
Windows Version: Windows 2000
Process Chamber Configuration
Shower Heads: 16-289070-00
Pedestal Position #1-#4 (ASSY, PED,300MM WCVD,PREHEAT): 16-341152-00
MOER Rings 2.25mm: 02-344085-02
Remote Plasma Clean(Generator, 4L, Astron): 27-261291-00
Indexer Plate, HUB: 15-100082-00
Indexer Plate, Upper Assembly: 15-046309-00
Spindle Assembly: Servo 853-176563-001
Pin Lift: Servo 15-381813-00
IR Endpoint Detector, Kit: 27-304149-00
Leak Check Shutoff Valve for Process Module: 60-268274-00
ASSY,HOLDER,CARRIER RING,300MM,C3 ALTUS: 02-332440-00
Throttle Valve MKS (Pressure Control Valve): 60-174047-00
Throttle Valve MKS (Controller/Firmware): 27-325180-00
Gate Valve, L-Motion, SMC: 63-294083-02
KIT,SYMM FORELINE & EXHAUST,C3ALT: 04-363404-00
Gas Box Configuration:
Micron Special: All Digital MFC with Gas Interface: B2H6 PA type , others are PI type
ALD valves: ALD Valves
Slot: Gas
A & B Manifold:
3: PI-980 H2 / 30 SLM
4: PI-980 Ar / 20 SLM
I: PI-980 NF3 / 5 SLM
D Manifold:
1: PI-980 Ar / 5 SLM
2: PI-980 SiH4 /500 SCCM
N: FC-PA7800C B2H6 /500 SCCM
H Manifold:
D: PI-980 Ar/20 SLM
W Manifold:
5: PI-980 WF6/500 SCCM
C Manifold:
8: PI-980 Ar/10 SLM
9: PI-980 H2 / 30 SLM
J Manifold:
E: PI-980 WF6/500 SCCM
K Manifold:
G: PI-980 SiH4 /500 SCCM
F: PI-980 Ar/5 SLM
X: FC-PA7800C B2H6 /750 SCCM
Ar Carrier Manifold:
C: PI-980 Ar / 20 SLM
M: PI-980 Ar / 20 SLM
M Manifold:
J: PI-980 WF6/500 SCCM
N Manifold:
K: PI-980 WF6/500 SCCM
F Manifold:
P: PI-980 Ar / 20 SLM
Baratron
Altus, CAP MANOMETER,HEATED 100 TORR: 27-10340-00
Altus, CAP MANOMETER,HEATED 10 TOR: 27-10343-00
Altus, Backside, CAP MANOMETER,HEATED 100 TORR: 27-10340-00
WTS, Loadlock, MANOMETER,100T,MKS,750B,DSUB: 27-126439-00
WTS, TM, CAP MANOMETER,HEATED 100 TORR: 27-10340-00
Damage/Missing parts list
Please inspect tool to reconfirm
Pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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