Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Dainippon Screen Mfg. Co. (DNS)
Date of Manufacture: AUG. 2003
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
WET 15-3DNS_SS30_SCR_04SSDS DNS SS3000 SCR
Defective parts: Fab15 confirmed there was one defective part of Service panel. Please see a photo of the defective part.
CONFIGURATION & PHOTOS AVAILABLE. Please ask your sales person.
| OEM | DNS | ||
| Tool Model | SS3000 | ||
| Process | Scrubber | ||
| Software Version (include revision #) | V212F000 | ||
| System Power Rating | 208AC 3-phase | ||
| Loading Configuration | 3 load ports | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | U03 SS(Surface) | CO2Water | |||
| Chm/Unit Position 2 | U04 SS(Surface) | CO2Water | |||
| Chm/Unit Position 3 | U05 SSR(Backside) | CO2Water | |||
| Chm/Unit Position 4 | U06 SSR(Backside) | CO2Water | |||
| Chm/Unit Position 5 | U07 Reverser | N/A | |||
| Chm/Unit Position 6 | U08 Reverser | N/A | |||
| Description | Qty | |||||
| Tool: | ||||||
| Process Unit: | Model: | Remark | ||||
| Controller: | Process Modules | 1 | ||||
| MFC/Pressure Unit: | Loadport | 3 | ||||
| Drive Mechanisms: | Power supply unit | 1 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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