Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. TELFORMULA Nitride

Asset ID: 79170

Print spec sheet

Tokyo Electron Ltd.

TELFORMULA Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Process: NITR


From original tool PO, please inspect to verify


2.2- General Specification

Safety Specification: SEMI S2-0703

Heater Model: Mid-Temp. VCM-50-012L

Compatible with Atmospheric Process: None

Maximum Operating Temperature (C): 800C

ART Control: Yes

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 50

Software Version (WAVES): 2.12 REV.R006

Seismic Isolation Configuration: None


3.1.1- Furnace Spec, Furnace

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: 20m

Ionizer (maker/model): None

Chemical PreFilter-Acid: None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarb: Yes

Chemical PreFilter-Location: FNC Top

Side Maintenance: None


3.1.2- Furnace Spec, Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris/A300

Carrier Stage Capacity: 10

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3


3.1.3- Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: Bottom Connection

Electric Fan Exhaust Facility Connection: Not Installed

Air Intake Point: Top


3.2.1- Gas Spec, Gas Distribution System

IGS Type: IGS 1.5"W-Seal rail-mount

IGS Maker: Fuijikin

Tubing Bends: Bend (Less than 91deg)

IGS Final Filter: Entegris

IGS Regulator: CKD

IGS MFC (Maker/Type): HORIBA STEC / Digital

IGS MFC for low flow N2 purge when cleaning: HORIBA STEC / SEC-G111

IGS Press. Transducer: Nagano

Liquid Source Vapor System Maker / Model: HORIBA STEC / LSC-F510

Auto-Refill System- : Schumacher / CG100

Auto Refill System Provider: Provided by customer

Refill System Tubing interconn: Provided by customer

Ozone Delivery System: None

Ozone Delivery System Provider: None

Water Vapor Generator (WVG): None


3.2.2- Gas Spec, Gas Facilities

Incoming Gas Connection Point: Bottom Connection

Gas VENT Connection Point: None

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection


3.3.1- Exhaust Specificationbution

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer

Main Valve: CKD-VEC 3"

Pump Maker/Model: EDWARDS / iXH-1820T

Pump Provided by: Customer

Abatement System Type: Burning Type

Abatement System (Maker/Model): EDWARDS / TCS

Abatement System Provider: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: Power Box Top

Pump-FNC Vacuum Piping Provide: Customer


3.4.1- Reactor Specification

Quartz Provided by: Customer

Cap Type: Quartz

Cap Heater: Yes

Switch Valve for Cap Cooling Water: Yes

Cooling Water for Cap Rotation: Yes

Heat Shield Type: HS Plate


3.5.1- Power Specification, Power dist System

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: None

Single-phase connection type: N/A

Frequency: 60Hz

Wattmeter: None

Control Power UPS provided by: N/A

Control Power UPS type: N/A

UPS Input/Output Voltage: N/A


3.5.2- Power Specification, Cable Length

Power Cable Input Entrance Loc: Power Box Top

Other power requirement: None

FNC - Power Box: 30m

FNC - RCU: 30m

Power Box - Pump Unit: 30m

Power Box - Refill System: 30m


Damage/Missing parts list

Please inspect tool to reconfirm

Any tool Hard Disk Drive (HDD) , Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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