Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: July, 2004
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 10/1/2021
DIFFUSION 15-3TEL_A303I_HT TEL AA300
Tool has been powered off.
One damaged Heater (Hi-Temp. VMU-54-001, 5zone / 850-1200).
Missing heater core and main display.
Quartz is never included.
Missing or damaged parts List.
A Hard Disk Drive is not included.
Other missing or damaged parts:
| SiC Pin | 2105-420648-11 | Missing |
| Quartz Pedestal Base | 2105-220747-91 | Missing |
| Qaurtz Base Support | 1105-302152-91 | Missing |
| SiC Fin(A) | 1105-302146-91 | Missing |
| SiC Fin(B) | 1105-302147-91 | Missing |
| Quartz Fins | 1105-302151-91 | Missing |
| Quartz Cap | 1105-302489-91 | Missing |
| Qaurtz Base Support | 1105-302153-91 | Missing |
| Qauartz Cap | 1105-302158-91 | Missing |
| Quartz Sleeve | 1105-401432-91 | Missing |
| Quartz Positioning Pin | 1105-401429-91 | Missing |
Tube Material:Quartz
Boat Material:SIC
Production wafes:100
Process Gas:Ar(F.S:30slm),O2(F.S:30slm),N2(F.S:30slm),DCE(F.S:1slm)
Water generating Type:External Torch
MFC Maker:HITACHI-Metals
MFC Model:FC-D98series
Process Temp:700-1100deg
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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