Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

SEZ Group DV-34

Asset ID: 67441

Print spec sheet

SEZ Group

DV-34

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: SWC

 

Tool config is based on original PO, please verify tool details at tool inspection

 

Chamber R1 & Chamber R2 & Chamber L1 & Chamber L2

Med. 1:49%HF

Med. 2: Poly

DI Dispenser

N2 Dispemser: Bronkhost Mass Flow Controller

Chuck N2 MFC

Chuck: Advanced Pin Chuck

 

Medium1

Chemical: HF(49%)

Temperature control: B&R controller, Inlineheater Lufran 6KW*2

Circulation pump: :evitronix BPS-3

Filter: Entegris

Concentration Monditor: NA

 

Medium2

Chemical: Poly

Temperature control: B&R controller, Inlineheater Lufran 6KW

Circulation pump: Levitronix BPS-3

Filter: Entegris

Concentration Monditor: Horiba CS-100 series

                                                  

Damage/Missing parts list

Please inspect tool to reconfirm

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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